Carbon nanosphere templates for the preparation of inverse opal titania photonic crystals by atomic layer deposition

Bakoš, L.; Karajz, Dániel Attila; Katona, András; Hernádi, Klára; Parditka, Bence; Erdélyi, Zoltán; Lukács, István Endre; Hórvölgyi, Zoltán; Szitasi, Geza; Szilágyi, Imre Miklós

doi:10.1016/j.apsusc.2019.144443

Cited by 26 publications

(12 citation statements)

References 37 publications

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“…The atomic layer deposition (ALD) is achieved by exposing the substrate surface alternately to different gas phase precursors to make them be chemically adsorbed and reacted on the substrate (Figure 6a). [86,87] In essence, ALD is a CVD technology, but it is different from the traditional CVD. The traditional CVD is a continuous deposition process.…”

Section: Ald Methodsmentioning

confidence: 99%

Recent Advances in Preparation and Applications of 3D Transition Metal Oxides Semiconductor Photonic Crystal

Yan

Meng

Qiu

et al. 2021

Advanced Photonics Research

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Nanostructured transition metal oxides (TMOs) semiconductor materials, whose photoelectric properties are significantly improved due to their nanostructures, have attracted more and more attention in recent years. As a functional material with periodic nanostructures and unique optical properties, photonic crystals (PhCs) have become an important option for nanostructuring semiconductor materials. The TMO semiconductor PhC (TMOPC), which is integrated by combining TMO with PhC, not only has the sensitivity of the TMO semiconductor to environmental stimulus, but also can improve the utilization rate of light and make the material have the optical response due to the optical modulation of PhC, such as slow light effect. The application of TMOPCs is widely promoted and expanded due to the improvement of its performance. Herein, this review summarizes the preparation methods of 3D TMOPCs in recent years and their main applications. The limitation and potential development of 3D TMOPCs in preparation and application are also discussed and prospected.

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Section: Ald Methodsmentioning

confidence: 99%

Recent Advances in Preparation and Applications of 3D Transition Metal Oxides Semiconductor Photonic Crystal

Yan

Meng

Qiu

et al. 2021

Advanced Photonics Research

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“…The resulting self-supported structure of fully crystallized nanoparticles offers a porous network with a large surface area. As shown in Figures 5c and 6b, carbon nanocoils [49] and nanospheres [50] were also investigated and used as sacrificial templates to prepare distinctive helical nanotubes and inverse opal photonic crystals, respectively, indicating potential applications in sensors, mechanical springs, and photocatalysis areas. Similarly, silica nanospheres [51] were utilized to fabricate inverse opal photonic crystals as shown in Figure 6d, which revealed a potential application in photocatalytic and solar cells.…”

Section: Other Rigid Templatesmentioning

confidence: 99%

“…3D nanostructure could also be formed by the inverse opal (IO) structures, which possess size adjustable pore structure, large surface area, and optical properties of photonic crystals. The inverse opal nanostructures are usually fabricated using a template of silica [50] or polymer micro-spheres by the self-assembly route. Polystyrene sphere (PSS) templates are most commonly used and easily removed by calcination.…”

Section: Assembled Polymer Templatesmentioning

confidence: 99%

Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

Geng

Zhang

et al. 2022

Micromachines

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Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Reliable fabrication, improved controllability, and multifunction integration are desired for further applications in commercial devices. In this review, a powerful fabrication method to realize 3D nanostructures is introduced and reviewed thoroughly, which is based on atomic layer deposition assisted 3D assembly through various sacrificial templates. The aim of this review is to provide a comprehensive overview of 3D nanofabrication based on atomic layer assembly (ALA) in multifarious sacrificial templates for 3D nanostructures and to present recent advancements, with the ultimate aim to further unlock more potential of this method for nanodevice applications.

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“…Opal crystal templates were synthesized by vertical deposition similar to the method our researched group used in an earlier article [42]. 460 nm diameter polystyrene nanospheres (Sigma Aldrich) were received in the form of 10 w/w% water suspension, which was diluted to a 0.3 w/w% suspension and ultrasonicated for 2 h. In the meantime, Si substrates were sliced to make roughly 1 × 3 cm slides, these slides were cleaned with soap, then ethanol and distilled water, finally treated with "piranha" solution (3:1 mixture of concentrated sulfuric acid and 30% hydrogen-peroxide) for 1 h. For the vertical deposition the slide was put in vertically in the suspension and got heat treated in a Nabertherm L9/11/B410 furnace with the following heat program: 40 h at 50 °C, then 6 h at 80 °C.…”

Section: Preparation Of the Colloid Crystalsmentioning

confidence: 99%

Combining ZnO inverse opal and ZnO nanorods using ALD and hydrothermal growth

Karajz

Cseh

Parditka

et al. 2022

J Therm Anal Calorim

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In this paper, we combine the atomic layer deposition synthesis method of inverse opal with the hydrothermal growth of nanorods. From 460 nm polystyrene nanospheres opal crystals were produced using vertical deposition on Si wafers. The opal templates were covered with ZnO by atomic layer deposition. High temperature annealing was used to remove the polystyrene nanospheres to obtain the inverse opal structure. For the hydrothermal growth of ZnO nanorods, two production routes were analysed: hydrothermal reaction before and after the removal of the template. The two paths produced two distinct structures, one with plate like formations and one with nanorods, respectively. Also, the sample modified by the hydrothermal growth after the annealing showed slight differences in optical properties compared to the regular inverse opal. Morphology, composition and structure of the samples were explored using SEM, EDX and XRD. Optical properties were investigated with reflectance UV–Vis spectroscopy. Thermal stability of the polystyrene opal was determined using TG.

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Carbon nanosphere templates for the preparation of inverse opal titania photonic crystals by atomic layer deposition

Cited by 26 publications

References 37 publications

Recent Advances in Preparation and Applications of 3D Transition Metal Oxides Semiconductor Photonic Crystal

Recent Advances in Preparation and Applications of 3D Transition Metal Oxides Semiconductor Photonic Crystal

Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

Combining ZnO inverse opal and ZnO nanorods using ALD and hydrothermal growth

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