Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

Abstract

Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Reliable fabrication, improved controllability, and multifunction integration are desired for further applications in commercial devices. In this review, a powerful fabrication method to realize 3D nanostructures is introduced and reviewed thoroughly, which is based on atomic layer deposition assisted 3D assembly through various sacrificial templates. The aim of this review is to provide a comprehensive overview of 3D nanofabrication based on atomic layer assembly (ALA) in multifarious sacrificial templates for 3D nanostructures and to present recent advancements, with the ultimate aim to further unlock more potential of this method for nanodevice applications.

Atomic/molecular layer deposition strategies for enhanced CO2 capture, utilisation and storage materials

“…193 The Ni NPs are not solely limited to the confines of Al Various advantages of sacrificial templates for ALD-designed catalysts for various catalytic applications cannot be exhausted, which is covered by other review papers. 48,91,228,229 Unlike ALD which uses an external template, MLD has been used to directly deposit sacrificial templates to synthesize thinfilm materials by the post-treatment to remove the organic components in the film. For instance, porous metal oxide films featuring well-defined porous structures can be produced using MLD from dense organic/inorganic hybrid polymer films.…”

“…Various advantages of sacrificial templates for ALD-designed catalysts for various catalytic applications cannot be exhausted, which is covered by other review papers. 48,91,228,229…”

Optical Characterization of ALD-Coated Nanoporous Alumina Structures: Effect of Sample Geometry or Coated Layer Material

“…Therefore, ALD is usually considered a promising technique with huge prospects in the fields of micro-and nanofabrication technologies [3][4][5]. In addition to that, the combined use of ALD with either soft or hard templates opens up a new route for the development of novel nanomaterials and nanodevices through the so-called atomic layer assembly fabrication method [6][7][8]. These advanced nanomaterials have found promising applications in fields such as catalysis [9][10][11], energy conversion and storage [12][13][14][15][16][17][18][19], or photonics [7,8,20].…”

Editorial for the Special Issue on Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability

“…To further advance their applications in commercial devices, there is a need for reliable fabrication methods, improved control, and enhanced ability to integrate multiple functions. Geng et al [ 2 ] reviewed in depth a powerful method for realizing 3D nanostructures through atomic layer deposition-assisted 3D assembly using various sacrificial templates. The aim is to provide a comprehensive understanding of the use of atomic layer assembly (ALA) in a variety of sacrificial templates for 3D nanostructures and to highlight recent advancements.…”