Calculation and verification of quadrature coupling coefficients of silicon microgyroscope

Shao-dong, 姜劭栋 Jiang; An-ping, 裘安萍 Qiu; Qin, 施芹 Shi; Yan, 苏岩 Su

doi:10.3788/ope.20132101.0087

Cited by 4 publications

(3 citation statements)

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“…Equivalent model of driving beam. The shape of driving beam is U-beam, and a U-beam can be seen as two constrainted cantilevers in series [5]. The schematic of the constrainted cantilever beam is shown in Fig.…”

Section: Theoretical Analysismentioning

confidence: 99%

Analysis of Impact of Driving Amplitude on Resonance Frequency of Silicon Microgyroscope

Jiang

Shi

et al. 2014

AMR

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Increasing the driving amplitude could improve the sensitivity of silicon microgyroscope, which is the effective way to enhance the performance of gyroscope. However the large driving amplitude leads to the nonlinear effect. As a result, the resonance frequency is dependent with the driving amplitude, which influences the frequency stability of gyroscope. The equivalent model of driving beam is established, and the stiffness formulas of driving beam are derivated according to the large deflection theory. The linear stiffness of driving beam is 270.1N/m and the nonlinear stiffness is 3.237×108N/m3, which are 2.7% and 6.4% different from the simulative results. Harmonic balance method can be used to establish the relationship between driving amplitude and resonance frequency. The theoretical analysis results are carried out compared with the simulative analysis results. Also the impact of driving amplitude on resonance frequency is confirmed by experiment test. This paper is significant for improving the frequency stability, and provides a theoretical basis for optimizing the structure of gyroscope.

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Section: Theoretical Analysismentioning

confidence: 99%

Analysis of Impact of Driving Amplitude on Resonance Frequency of Silicon Microgyroscope

Jiang

Shi

et al. 2014

AMR

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“…Quadrature error exists because of the processing error [5] . So Vsense will be a sinusoidal signal at the same frequency of Vds instead of zero even if there is no anger rate input.…”

Section: Theoretical Analysis Demodulation Principlementioning

confidence: 99%

Analysis and Experimental Verification on Bias Drift of Silicon Microgyroscope

Tang

Qiu

et al. 2014

AMM

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There is a bias drift of silicon microgyroscope when power on which limits its application in higher precision field. This paper analyzes and validates the main cause of bias drift, combined with theoretical analysis of demodulation and experimental results, which has a great significance for improving the performance of silicon microgyroscope. First of all, operating principle of silicon microgyroscope is introduced and theoretical analysis on bias drift is made on the basis of DC output voltage of microgyroscope. Secondly, demodulated signals’ amplitude and phase are analyzed in Matlab with the experimental data. By contrasting theoretical and experimental bias drift, the accuracy of theoretical formula is verified. It turns out that, the relative error of bias drift from 2-hours value to stable value is 5.5%, it’s 6.6% for 1-hour value to stable value and for beginning it’s just 1.7%. Experimental results agrees well with the theoretical analysis, which verifies that the main cause of bias drift of silicon microgyroscope is the phase difference between Vds and Vsense. This conclusion can provide some guidance for structure design optimization and circuits improving.

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“…Vsense which represents the input angular rate multiplies with Vds and turns into the final output Vout(voltage of output) by going through low-pass filter. Quadrature error exists because of the processing error [5] . So Vsense will be a sinusoidal signal at the same frequency of Vds instead of zero even if there is no anger rate input.…”

Section: Experimental Analysis Experimental Parameters (1) Vds Signal...mentioning

confidence: 99%

Vibration Analysis of Silicon Microgyroscope Based on Simulink

Tang

Qiu

et al. 2014

AMM

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To improve the anti-vibration capability of silicon mcrogyroscope, making it works well under the vibration environment, this paper analyzes the dual-mass silicon mcrogyroscope and did the following works. First of all, the operating principle, analysis parameters of silicon microgyroscope and the vibration condition are introduced. Secondly, this paper proposes a vibration analysis method base on the signal conversion between time domain and frequency domain and establishes a Simulink demodulation model according to circuits of silicon microgyroscope. Finally, we get the conclusion that under the condition of vibration, composition with the same frequency of Vds in Vsense signal is the main influence factor of bias stability by analyzing experimental data. This has a great significance for improving the anti-vibration capability and guiding the interior structure design of silicon microgyroscope.

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Calculation and verification of quadrature coupling coefficients of silicon microgyroscope

Cited by 4 publications

References 0 publications

Analysis of Impact of Driving Amplitude on Resonance Frequency of Silicon Microgyroscope

Analysis of Impact of Driving Amplitude on Resonance Frequency of Silicon Microgyroscope

Analysis and Experimental Verification on Bias Drift of Silicon Microgyroscope

Vibration Analysis of Silicon Microgyroscope Based on Simulink

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