Analysis of Impact of Driving Amplitude on Resonance Frequency of Silicon Microgyroscope

Abstract

Increasing the driving amplitude could improve the sensitivity of silicon microgyroscope, which is the effective way to enhance the performance of gyroscope. However the large driving amplitude leads to the nonlinear effect. As a result, the resonance frequency is dependent with the driving amplitude, which influences the frequency stability of gyroscope. The equivalent model of driving beam is established, and the stiffness formulas of driving beam are derivated according to the large deflection theory. The linear stiffness of driving beam is 270.1N/m and the nonlinear stiffness is 3.237×108N/m3, which are 2.7% and 6.4% different from the simulative results. Harmonic balance method can be used to establish the relationship between driving amplitude and resonance frequency. The theoretical analysis results are carried out compared with the simulative analysis results. Also the impact of driving amplitude on resonance frequency is confirmed by experiment test. This paper is significant for improving the frequency stability, and provides a theoretical basis for optimizing the structure of gyroscope.