Vibration Analysis of Silicon Microgyroscope Based on Simulink

Abstract

To improve the anti-vibration capability of silicon mcrogyroscope, making it works well under the vibration environment, this paper analyzes the dual-mass silicon mcrogyroscope and did the following works. First of all, the operating principle, analysis parameters of silicon microgyroscope and the vibration condition are introduced. Secondly, this paper proposes a vibration analysis method base on the signal conversion between time domain and frequency domain and establishes a Simulink demodulation model according to circuits of silicon microgyroscope. Finally, we get the conclusion that under the condition of vibration, composition with the same frequency of Vds in Vsense signal is the main influence factor of bias stability by analyzing experimental data. This has a great significance for improving the anti-vibration capability and guiding the interior structure design of silicon microgyroscope.