Bias Contributions in a MEMS Tuning Fork Gyroscope

Walther, Arnaud; Blanc, Christophe; Delorme, Nicolas; Deimerly, Yannick; Anciant, R.; Willemin, J.

doi:10.1109/jmems.2012.2221158

Cited by 50 publications

(26 citation statements)

References 7 publications

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“…Five types of springs (drive, tuning-fork, drive-Coriolis decoupling, Coriolis-lever decoupling and rotational hinge) are highlighted in the figure, as well as the gauge position. Option (b) includes a single lever externally placed at one device side, resembling first configurations proposed for this kind of gyroscope [23], [24]. Option (c) includes separate levers for the sense frames.…”

Section: Z-axis Device Designmentioning

confidence: 99%

“…The zero-rate offset, all appearing in the quadrature channel, is of 24 dps and 16 dps respectively. The absence of any noticeable offsets in the Coriolis channel is ascribed (i ) to low impact of comb-drive defects (see [23]) and (ii) to the fact the resistive readout is quite immune from possible capacitive couplings of any signals occurring in phase with the Coriolis signal.…”

Section: A Sensitivity and Linearitymentioning

confidence: 99%

See 1 more Smart Citation

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Dellea

Giacci

Longoni

et al. 2015

J. Microelectromech. Syst.

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This paper presents a new design and a complete characterization of amplitude-modulation gyroscopes based on piezoresistive nanogauges. The working principle and optimization criteria of in-plane and out-of-plane devices relying on double frame decoupling and levered sense mode are discussed in light of sensitivity and resolution theoretical predictions. The architecture of driving and sensing electronics is also presented. The reduced thermo-mechanical damping with respect to capacitive configurations, and the inherently high output signal leads to white noise performance in the mdps/ √ Hz range within an area smaller than 0.35 mm 2 , at pressures in the millibar range. Sub-5-ppm linearity errors within 1000 dps are also demonstrated.[2015-0064]

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Section: Z-axis Device Designmentioning

confidence: 99%

Section: A Sensitivity and Linearitymentioning

confidence: 99%

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Dellea

Giacci

Longoni

et al. 2015

J. Microelectromech. Syst.

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show abstract

“…For another type devices, this vibration behavior can be localized to improve signal noise ratio (SNR) greatly [4]. Nevertheless, more common but inevitable phenomenon for all of MEMS devices during vibration occurrence is vibration energy dissipation behavior, typically such as micromachined Coriolis vibratory gyroscope (MCVG) [5][6][7]. The performance of this type of vibration system is significantly limited by the rate at which the vibration energy is dissipated, which is called time constant.…”

Section: Introductionmentioning

confidence: 99%

Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Zhou

Shen

Xie

et al. 2018

Shock and Vibration

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Energy dissipation contribution of micro-machined Coriolis vibratory gyroscope (MCVG) is modeled, numerically simulated, and experimentally verified in this paper. First, the amount of independent damping dissipation consisting of thermoelastic loss, anchor loss, surface loss, Akhiezer loss, and air damping loss during vibration is obtained by simulation model, PML-based method, and numerical calculation, respectively. Then, temperature and pressure dependence characteristic of the corresponding quality factor (Q) for the MCVG are obtained. Meanwhile, dominant sources of damping dissipation are determined, which paves the way to improve Q. Finally, the temperature-dependent and pressure-dependent characteristics of the total Q are measured with errors of less than 10% and 18% compared with the simulated total Q, respectively, in which accuracy is acceptable for predicting the damping dissipation behavior of MCVG in design stage before high-cost fabrication.

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“…The coupling stiffness leads to the drive mode movement coupled directly to the sense mode, and generates the mechanical quadrature error (QUER), which has the same frequency but with a 90 deg phase difference with the Coriolis signal. 8 According to different steps and compensation objects, there are several methods that can decrease QUER. 6 Because of the special characteristic of the Coriolis signal, most of the research institutes employ the phase-sensitivity demodulation solution to detect it, 7 and a tiny phase difference of the demodulation reference obviously brings the influence of QUER signal on the output value.…”

Section: Introductionmentioning

confidence: 99%

“…6 Because of the special characteristic of the Coriolis signal, most of the research institutes employ the phase-sensitivity demodulation solution to detect it, 7 and a tiny phase difference of the demodulation reference obviously brings the influence of QUER signal on the output value. 8 Meanwhile, springs that can release more residual stress are a better choice. 9 First, in the structure design step: a careful mechanical design and simple structure are useful for reducing the influence in the manufacturing process.…”

Section: Introductionmentioning

confidence: 99%

Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope

Cao

2014

J. Micro/Nanolith. MEMS MOEMS

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This paper proposes an electrostatic stiffness correction method for the quadrature error (QUER) in a decoupled dual-mass gyroscope structure. The QUER is caused by the imperfections during the structure manufacturing process, and the two masses usually have different QUERs. The harm contribution to the Coriolis signal is analyzed and quantified. The generating forms of QUER motion in both masses are analyzed, the correction electrodes' working principle is introduced, and a single mass individual correction method is proposed. The QUER stiffness correction system is designed based on a PI controller, and the experiments are arranged to verify the theoretical analysis. The bias stability decreases from 2.06 to 0.64 deg ∕h after the QUER correction, and the parameters of scale factor such as nonlinearly, asymmetry, and repeatability, reduce from 143, 557, and 210 ppm to 84, 242, and 175 ppm, respectively.

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Bias Contributions in a MEMS Tuning Fork Gyroscope

Cited by 50 publications

References 7 publications

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope

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