Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Zhou, Jinqiu; Shen, Qiang; Xie, Jianbing; Cao, Pin; Yuan, Weizheng

doi:10.1155/2018/6901268

Cited by 4 publications

(5 citation statements)

References 66 publications

(76 reference statements)

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“…Secondly, it was obvious that the Coriolis quantity

is multiplied by a proportional coefficient

, which consequently reduces the scale factor of the actual angular rate output. Furthermore, the effect of the damping coupling can be neglectable compared with the quadrature error [ 29 ]. As a result, the phase delay online compensation can effectively reduce the coupling error in Coriolis output, which is necessary for improving the performance of the gyroscope.…”

Section: Phase Delay Analysis and Influencesmentioning

confidence: 99%

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Liu

Qin

2022

Micromachines

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In this paper, an online compensation method of phase delay error based on a Phase-Frequency (P-F) characteristic has been proposed for MEMS Coriolis Vibratory Gyroscopes (CVGs). At first, the influences of phase delay were investigated in the drive and sense mode. The frequency response was acquired in the digital control system by collecting the demodulation value of drive displacement, which verified the existence and influence of the phase delay. In addition, based on the P-F characteristic, that is, when the phase shift of the nonresonant drive force through the resonator is almost 0° or 180°, the phase delay of the gyroscope is measured online by injecting a nonresonant reference signal into the drive-mode dynamics. After that, the phase delay is self-corrected by adjusting the demodulation phase angle without affecting the normal operation of the gyroscopes. The approach was validated with an MEMS dual-mass vibratory gyroscope under double-loop force-to-rebalance (in-phase FTR and quadrature FTR) closed-loop detection mode and implemented with FPGA. The measurement results showed that this scheme can detect and compensate phase delay to effectively eliminate the effect of the quadrature error. This technique reduces the zero rate output (ZRO) from −0.71°/s to −0.21°/s and bias stability (BS) from 23.30°/h to 4.49°/h, respectively. The temperature sensitivity of bias output from −20 °C to 40 °C has reached 0.003 °/s/°C.

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“…Secondly, it was obvious that the Coriolis quantity

is multiplied by a proportional coefficient

Section: Phase Delay Analysis and Influencesmentioning

confidence: 99%

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Liu

Qin

2022

Micromachines

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“…In this work, a completely symmetrical Z -axis gyroscope was selected as the controlling object, as shown in Figure 1 . The detailed operation principles of the gyroscope are omitted here, as they were described in our previous work [ 24 ].…”

Section: Analysis Of Oscillation Of Sense Modementioning

confidence: 99%

“…Currently, the high-vacuum packaging technology is an efficient method to improve the performance of the MCVG. It can suppress some bias sources by increasing the quality factor ( Q ) of the MCVG [ 21 , 22 , 23 , 24 ]. Nevertheless, the MCVG, as a typical two-order mass-damping-stiffness system, almost works in a critical damping state with increasing Q .…”

Section: Introductionmentioning

confidence: 99%

Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method

Shen

Wang

et al. 2018

Sensors

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The oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope (MCVG) with high quality factor (Q) is analyzed in this study and the corresponding force feedback control scheme is presented to suppress this oscillation. The controller consists of integrator and some filters, instead of the common but complicated demodulation and remodulation modules. Compared with using no oscillation suppression scheme, the proposed simplified oscillation suppression control scheme can achieve an improvement of the sense mode of the MCVG. The inband spectrum ripple of the angular rate output are improved from 51.4 dB to 4.23 × 10−4 dB. Correspondingly, these two performance parameters are improved by 370.4 and 186.2 times, which are higher than two orders of magnitude, respectively. Bias stability is improved from 9.72 deg/h to 2.5 deg/h. Test results prove that the proposed control scheme is effective in suppressing the oscillation.

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“…The CMP process is used to maintain the thickness and quality of the structures, and thus it maintains the surface quality for the next anodic bonding process (e.g., sandwich structures). CMP techniques permit obtaining the desired thickness and surface quality and to meet the application requirements for different MEMS devices [ 11 , 12 ]. However, the methods are limited by the high surface quality and the high total thickness variation, which should be addressed [ 13 ].…”

Section: Introductionmentioning

confidence: 99%

Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application

Wang

Shen

et al. 2018

Sensors

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MEMS fabrication that is based on the silicon-on-glass (SOG) process requires many steps, including patterning, anodic bonding, deep reactive ion etching (DRIE), and chemical mechanical polishing (CMP). The effects of the process parameters of CMP and DRIE are investigated in this study. The process parameters of CMP, such as abrasive size, load pressure, and pH value of SF1 solution are examined to optimize the total thickness variation in the structure and the surface quality. The ratio of etching and passivation cycle time and the process pressure are also adjusted to achieve satisfactory performance during DRIE. The process is optimized to avoid neither the notching nor lag effects on the fabricated silicon structures. For demonstrating the capability of the modified CMP and DRIE processes, a z-axis micro gyroscope is fabricated that is based on the SOG process. Initial test results show that the average surface roughness of silicon is below 1.13 nm and the thickness of the silicon is measured to be 50 μm. All of the structures are well defined without the footing effect by the use of the modified DRIE process. The initial performance test results of the resonant frequency for the drive and sense modes are 4.048 and 4.076 kHz, respectively. The demands for this kind of SOG MEMS device can be fulfilled using the optimized process.

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Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Cited by 4 publications

References 66 publications

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method

Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application

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