2001
DOI: 10.1063/1.1367277
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Band gap engineering of amorphous silicon quantum dots for light-emitting diodes

Abstract: Amorphous silicon quantum dots (a-Si QDs), which show a quantum confinement effect were grown in a silicon nitride film by plasma-enhanced chemical vapor deposition. Red, green, blue, and white photoluminescence were observed from the a-Si QD structures by controlling the dot size. An orange light-emitting diode (LED) was fabricated using a-Si QDs with a mean size of 2.0 nm. The turn-on voltage was less than 5 V. An external quantum efficiency of 2×10−3% was also demonstrated. These results show that a LED usi… Show more

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Cited by 370 publications
(248 citation statements)
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“…It is well known that the silicon excess in silicon-rich dielectrics agglomerates forming Si-nps after high temperature annealing, resulting in a redshift of the PL band due to the quantum coninement efects [53][54][55][56][57]. However, contrary to this assumption, in this work, the PL blueshifts after the annealing, as shown in Figure 4(b).…”
Section: Silicon-rich Nitride (Srn) Ilmcontrasting
confidence: 53%
“…It is well known that the silicon excess in silicon-rich dielectrics agglomerates forming Si-nps after high temperature annealing, resulting in a redshift of the PL band due to the quantum coninement efects [53][54][55][56][57]. However, contrary to this assumption, in this work, the PL blueshifts after the annealing, as shown in Figure 4(b).…”
Section: Silicon-rich Nitride (Srn) Ilmcontrasting
confidence: 53%
“…The generation of the QD inside the a-SiO 2 matrix allows the formation of Si-O-Si bridge bonds at the Si/SiO 2 interface, and the reduction of the embedded system energy gap in all the systems, as shown by previous theoretical studies, 16,64 and in accordance with photoluminescence measurements where the energy gap for QDs around 2.5 nm in diameter was determined to be 1.9 eV for amorphous QDs 65 and 2.7 eV for crystalline ones. 66 Similarly to the crystalline case, HOMO and LUMO states of amorphous systems are localized at the surface of the QD and inside it, respectively.…”
Section: Sio 2 Matrices and Siqdssupporting
confidence: 53%
“…2(a)]. A monotonous increase of EL is observed, while the quantum-size effect is known to be significant only when the silicon layer thickness is below 10 nm [13], [14]. The electroluminescence is inversely proportional to the access region thickness in the full range.…”
Section: Resultsmentioning
confidence: 84%