2011 IEEE International Symposium on Assembly and Manufacturing (ISAM) 2011
DOI: 10.1109/isam.2011.5942327
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Abstract: In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

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Cited by 7 publications
(5 citation statements)
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“…It is produced using microelectro-discharge machining [36] and must be assembled onto the flexures to produce a fully working device. This assembly challenge has been realized by using a semi-automated desktop factory technique ideally suited to the assembly of microscale parts [37]. Surface interaction forces present in close-tosurface probing become increasingly disruptive when using a microscale stylus with a tip radius below 100 μm [38], reducing accuracy by false triggering or by the tip adhering to the measurement surfaces.…”
Section: Microcoordinate Metrologymentioning
confidence: 99%
“…It is produced using microelectro-discharge machining [36] and must be assembled onto the flexures to produce a fully working device. This assembly challenge has been realized by using a semi-automated desktop factory technique ideally suited to the assembly of microscale parts [37]. Surface interaction forces present in close-tosurface probing become increasingly disruptive when using a microscale stylus with a tip radius below 100 μm [38], reducing accuracy by false triggering or by the tip adhering to the measurement surfaces.…”
Section: Microcoordinate Metrologymentioning
confidence: 99%
“…An ultraviolet (UV) light source was also arranged within the workspace. The capability of this setup beyond that of conventional assembly systems, including accuracy, repeatability and the scope for automation, is fully described in [3]. The setup is shown in figure 2.…”
Section: Assembly Setupmentioning
confidence: 99%
“…Ultraviolet curable adhesive was chosen as the most suitable adhesive for the assembly [3]. Several types of UV curable adhesive were investigated specifically focusing on their uncured viscosities.…”
Section: Experiments With Uv Curing Adhesivementioning
confidence: 99%
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“…In addition, previous researchers reported various tactile sensing mechanisms of micro-CMM probing heads. However, these delicate triggering structures depended upon MEMS processes [10,11], which makes the probing heads so costly that they are not commercially available in the market. Our previous study reported a tri-switches tactile probing structure, focusing on only the vertical directional tactile triggering and few applications [12].…”
Section: Introductionmentioning
confidence: 99%