2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &Amp; Eurosensors XXXIII (TRANSDUCERS &Am 2019
DOI: 10.1109/transducers.2019.8808826
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Aqueous Media Electrostatic MEMS Sensors

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Cited by 6 publications
(6 citation statements)
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“…The device shows Q-factor of 249 in water with cantilever connected with a phase-lock-loop interface circuit, and Q-factor of 2096 in air. However, some other researchers suggested that the electrothermal actuation mode is not perform well comparing with the electrostatic actuation mode [133].…”
Section: Mechanical Based Biosensors For Chemicals and Pesticidesmentioning
confidence: 97%
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“…The device shows Q-factor of 249 in water with cantilever connected with a phase-lock-loop interface circuit, and Q-factor of 2096 in air. However, some other researchers suggested that the electrothermal actuation mode is not perform well comparing with the electrostatic actuation mode [133].…”
Section: Mechanical Based Biosensors For Chemicals and Pesticidesmentioning
confidence: 97%
“…In the actuations section, there are MEMS sensors developed with electrothermal, electrostatic, and capacitive excitation method. However, by comparing the electrostatic to the electrothermal excitation at a certain frequency in air and DI water, they found that the electrostatic actuation increased by 60-70 times in water due to the material permittivity and the thermal conductivity in the thermal actuation [133], [134].…”
Section: Mechanical Based Biosensors For Chemicals and Pesticidesmentioning
confidence: 99%
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“…This can be significantly more challenging than gaseous analytes, since the water effects must also be considered. As an example, work by Al‐Ghamdi et al [ 73 ] has led to the development of a polymeric sensing material (polyacrylamide) and the design of a functional electrostatic microelectromechanical systems (MEMS) sensor to identify mercury acetate in water. Thus, (collaborative) opportunities for the design of polymeric sensing materials continue to emerge; the potential applications are innumerable.…”
Section: Case Studies: Demonstrating the Design Frameworkmentioning
confidence: 99%