Analytical modeling of the electromechanical coupling of cantilever beams

Chaffey, Jason; Austin, Michael W.

doi:10.1117/12.469085

Cited by 11 publications

(9 citation statements)

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“…Abbaspour-Sani and Afrang [24] proposed to decrease the equivalent rigidity of the microswitch by using a structure composed of two displaceable microplates This structure preserves the microswitch parameters while increasing its lifetime. Similarly, Chaffey and Austin [25] decreased the equivalent rigidity of the microsystem and concluded that the use of two cantilever microbeams, when compared to a single microbeam structure, reduces significantly the pull-in voltage.…”

Section: Introductionmentioning

confidence: 97%

A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage

Samaali¹,

Najar

Choura³

et al. 2010

Nonlinear Dyn

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In this paper, we propose the design of an ohmic contact RF microswitch with low voltage actuation, where the upper and lower microplates are displaceable. We develop a mathematical model for the RF microswitch made up of two electrostatically actuated microplates; each microplate is attached to the end of a microcantilever. We assume that the microbeams are flexible and that the microplates are rigid. The electrostatic force applied between the two microplates is a nonlinear function of the displacements and applied voltage. We formulate and solve the static and eigenvalue problems associated with the proposed microsystem. We also examine the dynamic behavior of the microswitch by calculating the limitcycle solutions. We discretize the equations of motion by considering the first few dominant modes in the microsystem dynamics. We show that only two modes are sufficient to accurately simulate the response of the H. Samaali ( ) · S. Choura · M. Masmoudi

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Section: Introductionmentioning

confidence: 97%

A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage

Samaali¹,

Najar

Choura³

et al. 2010

Nonlinear Dyn

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“…We estimate the pull-out voltage by conducting a transient analysis. We assume that the initial state of the transient response is the ON state (both electrodes are in contact), and thus, the pull-out voltage can be estimated by solving the dynamic equations (5)(6)(7)(8)(9)(10)(11)(12)(13)(14). These equations are first discretized in space using the Galerkin approximation where the first mode shape is used as a test function.…”

Section: Simulation Results and Comparisonmentioning

confidence: 99%

“…The proposed ohmic contact RF microswitch consists of two microcantilevers [9]; at the end of each a moving rigid microplate is clamped, as shown in Figure 1. All microswitch structural components are made of a single layer polysilicon.…”

Section: Problem Formulationsmentioning

confidence: 99%

Novel design of MEMS ohmic RF switch with low voltage actuation

Samaali¹,

Najar

Choura³

et al. 2009

2009 3rd International Conference on Signals, Circuits and Systems (SCS)

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In this paper, we propose the design of an ohmic contact RF microswitch with low voltage actuation, where the upper and lower microplates are displaceable. We develop a mathematical model for the RF microswitch made up of two electrostatically-actuated microplates; each microplate is attached to the end of a microcantilever. We assume that the microbeam is flexible, the microplates are rigid bodies and the electrostatic force is nonlinear function of the displacement and voltage applied between the microplates. We formulate the static and eigenvalue problems associated with the proposed microsystem. We show that the resulting static pull-in voltage and switching time are reduced by 30 and 45%, respectively, as compared to those associated with a RF microswitch formed of a single microbeammicroplate system. We also show that, unlike the second and higher frequencies, a selected range of applied DC voltages, affects significantly the first frequency.

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“…After substituting (9) into the resulting equation, multiplying by ( ), using the orthogonality conditions of the mode shapes, and integrating numerically the outcome from 0 to 1, as shown below in (12), yield the following ROM equations:…”

Section: Electromechanical Modelmentioning

confidence: 99%

“…Abbaspour-Sani and Afrang [8] proposed a structure composed of two displaceable microplates for a microswitch application. Chaffey and Austin [9] presented another microswitch made of a double-cantilever microbeam structure. Samaali et al [10] demonstrated a double-cantilever microbeam to design an RF microswitch.…”

Section: Introductionmentioning

confidence: 99%

Modeling the Electrostatic Deflection of a MEMS Multilayers Based Actuator

Ouakad

Hawwa

Al‐Qahtani

2013

Mathematical Problems in Engineering

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An actuator comprised of a rigid substrate and two parallel clamped-clamped microbeams is modeled under the influence of electrostatic loading. The problem is considered under the context of nonlinear Euler's mechanics, where the actuating system is described by coupled integrodifferential equations with relevant boundary conditions. Galerkin-based discretization is utilized to obtain a reduced-order model, which is solved numerically. Actuators with different gap sizes between electrode and beams are investigated. The obtained results are compared to simulations gotten by the finite-element commercial software ANSYS.

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Analytical modeling of the electromechanical coupling of cantilever beams

Cited by 11 publications

References 0 publications

A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage

A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage

Novel design of MEMS ohmic RF switch with low voltage actuation

Modeling the Electrostatic Deflection of a MEMS Multilayers Based Actuator

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