Analysis, testing and optimisation of electrostatic comb-drive levitational actuators

Molfese, A.; Nannini, Andrea; Pennelli, Giovanni; Pieri, Francesco

doi:10.1007/s10470-006-8119-4

Cited by 9 publications

(8 citation statements)

References 13 publications

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“…They found that the effect can be predicted and, in some cases, counteracted by a special design. A more comprehensive finite element modeling (FEM) of the levitation effect has been performed more recently [4][5][6]. The effect can also be put to use, as shown in [7], where it is used for vertical actuation.…”

Section: Introductionmentioning

confidence: 99%

“…The fringe field lines from the top cause a net force upward. simulation studies[4][5][6] do not contain an investigation of the total comb drive capacitance change as a function of the applied driving voltage, but only as a function of the change in the height of the comb drive. Therefore, it is difficult to directly use the results from these studies for correcting the capacitance change like the one given in figure 3 for the levitation effect.…”

mentioning

confidence: 99%

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A method to extract the lateral and normal components of motion from the capacitance change of a moving MEMS comb drive

Spengen

Heeres

2007

J. Micromech. Microeng.

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MEMS comb drives made in surface micromachining can suffer from a parasitic out-of-plane motion (levitation) in addition to the intended lateral motion. We have developed a model that accurately describes the capacitance changes of an actuated comb drive that suffers from levitation. We show that the model can be used to very accurately extract the lateral motion as a function of actuation voltage. This enables us to use the comb drive as a position sensor with very high accuracy, which does not suffer from levitation-induced nonlinearities.

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Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

A method to extract the lateral and normal components of motion from the capacitance change of a moving MEMS comb drive

Spengen

Heeres

2007

J. Micromech. Microeng.

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“…Levitation modelling by used object-oriented methods Subject of calculations of the levitation forces and balance point in comb structures was taken up frequently. The analytical calculations based on the circuit modelling of capacitances were presented by van Spengen ( 2007) and Molfese et al (2006). The another methods were presented in Liao et al (2004) and Chyuan et al (2005).…”

Section: Numerical Modeling Of 3-d Comb Drivementioning

confidence: 99%

Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)

Wiak

Smółka

2009

COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering

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Purpose -The purpose of this paper is to discuss the numerical modelling of 3D structure of micro-electro-mechanical systems (MEMS) accelerometers. The general idea being discussed is the method of levitation force reduction, as the main source of incorrect mathematical model of comb drive structure. Design/methodology/approach -Accelerometers design is a highly interdisciplinary area and, therefore, different methods and tools have to be exploited. Dynamic accelerometer behaviour modelling has been performed by use of a new object-oriented model (NOOM), based on complex computer field and mechanical models. Findings -The paper describes methods of levitation force reduction in electrostatic comb drive structures based on electrostatic structural models and finite elements method. Research limitations/implications -In the present work, the authors limit themselves to the electrostatic energy domains. Practical implications -Both, mechanical and electric models of accelerometers give the input data for defining the object-oriented model, based on Matlab-Simulink platform, fulfilling the general demand of dynamic behaviour simulation of comb drive structure. The proposed by authors methodology could give valuable contribution to MEMS design methodology. Originality/value -A new methodology has been successfully applied to calculation of levitation force in different geometries of comb drive. This methodology could be useful for multidisciplinary MEMS systems.

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“…[1,5]. Apart from this typical parallel plate actuation configuration, other different ways to apply the electrostatic force have been developed by different groups [3,4,7] for in-plane and out-of-plane actuation.…”

Section: Introductionmentioning

confidence: 99%

“…A way to increase the force and, therefore, displacement for in-plane working devices is based on the array of comb-finger actuators [3]. Usually, these devices require a large area.…”

Section: Introductionmentioning

confidence: 99%

A Novel Micro/Nano Electromechanical Actuator with Integral Electrodes

Pallarès

Carmona²,

Duch

et al. 2007

2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Sys

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A novel electromechanical actuator (patent pending) is presented, based on the beam-like deformation of two parallel electrodes, both mounted together in the same device and with a small gap in between. It avoids the need of an actuator electrode placed on the substrate. Simulations, mainly performed with ANSYS, have been performed to obtain the performance of the actuator in static conditions. They show that 2D FEM models can be used with a reasonable accuracy. 3D models has to be more thoroughly developed, although a more realistic structure can be simulated, taking into account the electrical connection of the actuator electrodes . A simple analytical model has also been developed in order to estimate the static displacement of a beam with as many actuator electrodes as possible on top of it. The model is useful for a first estimation of device deformation. The working principle of the device is in this paper demonstrated by simulation, until future measurements are possible.

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Analysis, testing and optimisation of electrostatic comb-drive levitational actuators

Cited by 9 publications

References 13 publications

A method to extract the lateral and normal components of motion from the capacitance change of a moving MEMS comb drive

A method to extract the lateral and normal components of motion from the capacitance change of a moving MEMS comb drive

Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)

A Novel Micro/Nano Electromechanical Actuator with Integral Electrodes

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