A complete set of approximate, closed-form expressions, obtained with small displacements theory, for the spring constants of two kinds of serpentine springs (classic and rotated) is presented. The expressions are proposed as a tool for rapid design of microelectromechanical structures. The two designs are also studied numerically using the finite element method (FEM): analytical calculations and FEM simulations are compared. A comparison between the performances of the two designs is also briefly presented.

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This work presents an analysis of the levitation effect in electrostatic comb fingers and of its possible use for vertical or torsional actuation of micromachined structures. Two different levitational mechanical resonators were designed and fabricated in a thick-polysilicon technology. A study of the dependence of the force intensity on the geometric parameters of the actuators were performed using FEM simulations, and information about critical geometrical parameters in the design of operative levitational actuators were obtained. The devices were characterized and the obtained results were compared with FEM simulations

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