Analysis of a hollow-cathode reflex discharge in a hydrocarbon flow

Martens, V. Ya.; Shevchenko, E. F.

doi:10.1134/s1063784210080098

Cited by 1 publication

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“…Taking into consideration some of the features of this source on hydrocarbons [9,12], the discharge current was maintained in the range of relatively small values of 60-80 mA; the ion beam current to the substrate was of 35-70 mA. To study the energy spectra of extracted ions at work on hydrocarbons and organ silicon compounds, the technique with a multigrid energy analyzer probe described in our previous studies [12] was used. Argon and atmosphere air were used as "control" gases in this study.…”

Section: Methodsmentioning

confidence: 99%

Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode

Shevchenko

Тарала

Shevchenko

et al. 2014

Advances in Materials Science and Engineering

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Carbon diamond-like thin films on a silicon substrate were deposited by direct reactive ion beam method with an ion source based on Penning direct-current discharge system with cold hollow cathode. Deposition was performed under various conditions. The pressure (12-200 mPa) and the plasma-forming gas composition consisting of different organic compounds and hydrogen (C 3 H 8 , CH 4 , Si(CH 3 ) 2 Cl 2 , H 2 ), the voltage of accelerating gap in the range 0.5-5 kV, and the substrate temperature in the range 20-850 ∘ C were varied. Synthesized films were researched using nanoindentation, Raman, and FTIR spectroscopy methods. Analysis of the experimental results was made in accordance with a developed model describing processes of growth of the amorphous and crystalline carbon materials.

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Section: Methodsmentioning

confidence: 99%