Analysis and dynamic simulation of the synthetic voltage division controller for extending the parallel plate actuator stable range of motion

Li, Chong; Dean, Robert N.; Flowers, George T.

doi:10.1007/s00542-016-2903-6

Cited by 4 publications

(4 citation statements)

References 22 publications

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“…Tech nology with an SVD controller ensures stable operation and reduces input voltage. An SVD controller is useful for extra long stroke realization [74]. Cevher Ak et al presented an artificial bee colony algorithm for calculating the pull-in voltage of microactuators [75] A. Alneamy et al presented electrostatic MEMS actuators with contact pads and dim ples.…”

Section: Mathematical Modeling and Main Issuesmentioning

confidence: 99%

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

Morkvėnaitė-Vilkončienė

Bučinskas

Subačiūtė-Žemaitienė

et al. 2022

Micromachines

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The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.

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Section: Mathematical Modeling and Main Issuesmentioning

confidence: 99%

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

Morkvėnaitė-Vilkončienė

Bučinskas

Subačiūtė-Žemaitienė

et al. 2022

Micromachines

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“…This is caused by the nonlinearity of the driving electrostatic force, while the spring force is linearly proportional to the displacement. Thus, the electrostatic force grows faster than the spring force when the displacement increases [8]. If the V act attempts driving the movable electrode beyond one third of x 0 , the electrostatic force is always greater than the spring force, then the net force cannot reach to an equilibrium.…”

Section: Kinematics Of Ppasmentioning

confidence: 99%

Active vibration isolator based on micromachined electrostatic actuators

Li¹,

Yang²,

Dean³

et al. 2016

Micro & Nano Letters

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Parallel plate actuators (PPAs) are widely used actuators in microelectromechanical systems. A PPA can be utilised as a passive/active vibration isolator. A novel active vibration isolator with a simple structure, which requires a constant voltage source and series capacitor, is proposed. The principle of the spring softening effect is analysed, which can avoid a specific external disturbance by changing its resonant frequency. A simulation study was performed to verify the feasibility of this type of isolator.

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“…Several studies have been conducted over two decades to solve this problem, (14)(15)(16)(17)(18)(19)(20)(21)(22)(23) however none of them has achieved a displacement larger than 6 μm at a dc driving voltage typically used in MCU boards. We have focused on this matter and proposed a revolutionary structure that overthrows the conventional structures of electrostatic microactuators, which were considered to be unable to drive large amounts of displacement.…”

Section: Introductionmentioning

confidence: 99%

A Novel MEMS Actuator Driven with a Low DC Voltage

Mizuno

2023

Sensors and Materials

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In this paper, we propose a novel MEMS actuator that can achieve a relatively large in-plane displacement of 5 μm or more driven with a low dc voltage of 3.3 to 5.0 V to ensure compatibility with integrated circuits and microcontroller unit (MCU) boards. The drive mechanism is based on a comb-shaped electrostatic microactuator. However, in general, the electrostatic type can achieve only a small amount of displacement in spite of a large driving voltage. On the other hand, by vacuum-sealing a device with such an actuator to reduce air resistance and performing ac driving at the resonant frequency of the device, the driving voltage can be considerably reduced. However, in the case of devices that need to be driven with dc voltages, such as RF switches, 2D optical raster scanners, optical switches, and various sensors, displacement is not amplified even if operating in a vacuum environment. Moreover, it would be strongly desirable to control these devices directly using integrated circuits and MCU boards without any external driver boosters or power supplies. In this paper, we demonstrate that a 6 μm in-plane displacement can be achieved with a dc driving voltage of less than 8.0 V by using a pull-in phenomenon and multiple spring-mass systems based on a comb-shaped electrostatic MEMS actuator.

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Analysis and dynamic simulation of the synthetic voltage division controller for extending the parallel plate actuator stable range of motion

Cited by 4 publications

References 22 publications

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

Active vibration isolator based on micromachined electrostatic actuators

A Novel MEMS Actuator Driven with a Low DC Voltage

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