A Novel MEMS Actuator Driven with a Low DC Voltage
Jun Mizuno
Abstract:In this paper, we propose a novel MEMS actuator that can achieve a relatively large in-plane displacement of 5 μm or more driven with a low dc voltage of 3.3 to 5.0 V to ensure compatibility with integrated circuits and microcontroller unit (MCU) boards. The drive mechanism is based on a comb-shaped electrostatic microactuator. However, in general, the electrostatic type can achieve only a small amount of displacement in spite of a large driving voltage. On the other hand, by vacuum-sealing a device with such … Show more
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