Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

Morkvėnaitė-Vilkončienė, Inga; Bučinskas, Vytautas; Subačiūtė-Žemaitienė, Jurga; Šutinys, Ernestas; Viržonis, Darius; Dzedzickis, Andrius

doi:10.3390/mi13081256

Cited by 19 publications

(9 citation statements)

References 120 publications

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“…Deflection-voltage-curves normalized to the pull-in might give an impression if a model equation is suitable. A close related example is the electrostatic cantilever but also other MEMS systems with similar LPMs like MEMS gyroscopes [22] or RF-switches with three electrodes [26] are conceivable fields of application. Analytical models and especially the dimensionless form of the equation of motion might help to model complex MEMS actuators.…”

Section: Discussionmentioning

confidence: 99%

A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators

Wall,

Schenk,

Melnikov

et al. 2024

Preprint

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Symmetric double-sided electrostatic actuators in push-pull configuration are particularly suitable for linear actuation with low harmonic distortion. However, their motion still is largely determined by pull-in instabilities that are sensitive to geometry variations. A considerable simulation effort is therefore required when assessing manufacturing tolerances during the design process or determining the optimal operating point. Recently, an accurate method was demonstrated, allowing for the numerically inexpensive and experimentally non-destructive extraction of the full quasi-static performance of a clamped-free beam-like electrostatic micro-mechanical actuator with complex 3D design. The key step was to determine the voltage scaling related to the pull-in voltage based on data collected far away from pull-in conditions. This relates a dimensionless ansatz to the physical input voltages as well as the output like e.g. the actuator's tip deflection. For the chosen approach, however, the relationship between the model and the geometry parameters is unknown. In this paper we extend our method to enable quantifying the impact of geometry parameter variations. In particular, we adapt the model equation for the case of symmetry-breaking tolerances on the basis of few FEM-simulations. The quasi-static pull-in instability, as well as the nonlinear deflection, are consistently reproduced over the full range of relevant combinations of signal and bias voltages. Our analysis was developed in the context of a specific electro-acoustic transducer. However, we find indications that the underlying method is in fact applicable to a much broader range of micro-mechanical actuators.

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Section: Discussionmentioning

confidence: 99%

A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators

Wall,

Schenk,

Melnikov

et al. 2024

Preprint

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“…Apart from the materials/mechanisms discussed in the previous sections, TFFAs using conventional materials (e.g., polymers, metals, etc.) could also provide effective actuation through various mechanisms (e.g., electrostatic, [214][215][216][217][218][219][220][221][222][223][224][225][226][227][228][229][230] piezoelectric, [29,36,[231][232][233][234][235] electromagnetic, [23,236,237] pressure-driven, [238][239][240][241][242] and thermally induced strain mismatch [243][244][245][246][247][248][249][250][251][252] ).…”

Section: Tffas Based On Other Mechanisms/materialsmentioning

confidence: 99%

Thin‐Film‐Shaped Flexible Actuators

Pang

Liu

et al. 2023

Advanced Intelligent Systems

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Human‐like and creature‐like systems are one of the most representative imaginary blueprints of future robots. To fulfill this blueprint, the development of high‐performance actuators across different length scales is indispensable. Owing to their mechanical compliance and conformability to curvy surfaces of living organisms, flexible actuators have emerged as an essential direction of next‐generation actuators. This review focuses on thin‐film‐shaped flexible actuators (TFFAs), a rising family of flexible actuators, aiming to provide an overview of the state‐of‐art status in this exciting direction. The designs, manufacturing, and mechanisms of various TFFAs are summarized, according to their key composing materials/mechanisms, including, for example, nanomaterials, liquid crystal elastomers, shape memory polymers/alloys, hydrogels, biohybrids, and other mechanisms/materials. The representative applications of TFFAs are introduced, ranging from biomedical uses, robots for environment explorations, to haptic interfaces and reconfigurable electronics. Finally, the grand challenges and open opportunities are discussed in detail.

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“…There are also springs with a constant FDC [ 7 ]. The springs realize a constant force feedback when applying an external force, e.g., a voltage [ 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

Highly Selective Tilted Triangular Springs with Constant Force Reaction

Schmitt,

Hoffmann

2024

Sensors

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Guiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the reaction force and implements a constant reaction force. We show the influence of the tilting angle on the reaction force, on the spring stiffness and spring selectivity. Furthermore, we investigate the influence of the different spring geometry parameters on the spring reaction force. We experimentally show tilted triangular springs exhibiting constant force reactions in a large deflection range and a comb-drive actuator guided by tilted triangular springs. This is an expanded research article based on the conference paper “Tilted Triangular Springs with Constant Force Reaction” that was presented at EUROSENSORS2023 conference, 10–13 September 2023 in Lecce, Italy.

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Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

Cited by 19 publications

References 120 publications

A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators

A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators

Thin‐Film‐Shaped Flexible Actuators

Highly Selective Tilted Triangular Springs with Constant Force Reaction

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