An Improved Chemical Resistance and Mechanical Durability of Hydrophobic FDTS Coatings

Kobrin, Boris; Zhang, T; Grimes, Michael T.; Chong, Kar Lun; Wanebo, M; Chinn, Jeff; Nowak, R.

doi:10.1088/1742-6596/34/1/074

Cited by 18 publications

(14 citation statements)

References 1 publication

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“…It is noteworthy that FDTS coating forms a monolayer on the SMP surface which is not seriously damaged from heat and mechanical loads. 45 Therefore, the FDTS coated SMP surface with small and large pillars can be used repetitively without significant function deterioration.…”

Section: Resultsmentioning

confidence: 99%

Droplet manipulation on a structured shape memory polymer surface

Park

Kim

2017

Lab Chip

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While methods for dynamic tuning of surface wettability to manipulate water droplets have been widely explored for many applications including digital microfluidics, those based on dynamically changeable surface morphology have remained challenging to achieve. In this work, we present a structured shape memory polymer (SMP) surface which shows dynamically tunable surface wettability through changeable surface morphology in order to manipulate water droplets. The structured SMP surface involves a SMP pillar array consisting of nanotextured small and large pillars which can change its morphology between permanent and temporary shapes upon thermomechanical loading. Specifically, the structured SMP surface dynamically creates a surface morphological gradient and changes its surface wettability during thermally induced shape recovery of the SMP pillar array. Different wetting characteristics of the structured SMP surface between permanent and temporary shapes are theoretically predicted and experimentally verified. Based on these measured wetting characteristics, the structured SMP surface is designed to demonstrate that the morphological difference between two shapes under a water droplet overcomes contact angle hysteresis, resulting in driving a water droplet, when combined with the thermal Marangoni effect.iii ACKNOWLEDGMENTS

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Section: Resultsmentioning

confidence: 99%

Droplet manipulation on a structured shape memory polymer surface

Park

Kim

2017

Lab Chip

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“…The results, which are presented on Figure 3, were obtained using the software (called Dropsnake) developed by Stalder et al 45 to obtain the contact angle by using active contours (B-spline traces) to shape the water drop. In addition, we noticed that the aluminum oxide layer, when compared to polymeric or metal surfaces, has improved stability and durability of the deposited peg silane and FDTS films most likely due to the higher density of reactive hydroxyl groups on the surface of the oxide film 44 .…”

Section: Methodsmentioning

confidence: 94%

“…The peg silane hydrophilic monolayer was obtained by sequential injection of methoxy(polyethylleneoxy)propyltrimethoxysilane (Gelest Inc.) and water on the reaction chamber under vacuum with reaction time of 15 minutes. The FDTS hydrophobic monolayer was obtained by sequential injection of (Heptadecafluoro-1,1,2,2-Tetrahydrodecyl) Trichlorosilane (Gelest Inc.) and water on the reaction chamber with reaction time of 5 minutes 44 . In both cases the temperature of the precursors was kept constant at 55 °C and the MVD reaction chamber was 35 °C.…”

Section: Methodsmentioning

confidence: 99%

Extension of the broadband single-mode integrated optical waveguide technique to the ultraviolet spectral region and its applications

Wiederkehr

Mendes

2014

Analyst

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We report here the fabrication, characterization, and application of a single-mode integrated optical waveguide (IOW) spectrometer capable of acquiring optical absorbance spectra of surface-immobilized molecules in the visible and ultraviolet spectral region down to 315 nm. The UV-extension of the single-mode IOW technique to shorter wavelengths was made possible by our development of a low-loss single-mode dielectric waveguide in the UV region based on an alumina film grown by atomic layer deposition (ALD) over a high quality fused silica substrate, and by our design/fabrication of a broadband waveguide coupler formed by an integrated diffraction grating combined with a highly anamorphic optical beam of large numerical aperture. As an application of the developed technology, we report here the surface adsorption process of bacteriochlorophyll a on different interfaces using its Soret absorption band centred at 370 nm. The effects of different chemical compositions at the solid/liquid interface on the adsorption and spectral properties of bacteriochlorophyll a were determined from the polarized UV-Vis IOW spectra acquired with the developed instrumentation. The spectral extension of the single-mode IOW technique into the ultraviolet region is an important advance as it enables extremely sensitive studies in key characteristics of surface molecular processes (e.g., protein unfolding and solvation of aromatic amino-acid groups under surface binding) whose spectral features are mainly located at wavelengths below the visible spectrum.

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“…With its Teflon-like properties, FDTS is often used in MEMS to chemically passivate surfaces, to prevent surface wetting, or to eliminate stiction [11]. In this work, FDTS SAM fine pattern was applied to define the binding-sites on hydrophilic SiO 2 carrier wafer for chip to wafer self-alignment by capillary force.…”

Section: A Patterning Of Hydrophobic Fdts By Lift-offmentioning

confidence: 99%

Chip to wafer temporary bonding with self-alignment by patterned FDTS layer for size-free MEMS integration

Takagi

Maeda

2011

2011 IEEE SENSORS Proceedings

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In this paper, we present a low-cost and rapid selfalignment process for temporary bonding of MEMS chip onto carrier wafer for size-free MEMS-IC integration. For the first time, a hydrophobic self-assembled monolayer (SAM), FDTS (CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 ), was successfully patterned by lift-off process on an oxidized silicon carrier wafer. Small volume of H 2 O (~l/cm 2 ) was then dropped and spread on the non-coated hydrophilic SiO 2 surface for temporary bonding of MEMS chip. Our results demonstrated that the hydrophobic FDTS pattern on carrier wafer enables rapid and precise self-alignment of MEMS chip onto SiO 2 binding-site by capillary force. After transfer the MEMS chips to target wafer, FDTS can be removed by O 2 plasma treatment or UV irradiation.I.

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An Improved Chemical Resistance and Mechanical Durability of Hydrophobic FDTS Coatings

Cited by 18 publications

References 1 publication

Droplet manipulation on a structured shape memory polymer surface

Droplet manipulation on a structured shape memory polymer surface

Extension of the broadband single-mode integrated optical waveguide technique to the ultraviolet spectral region and its applications

Chip to wafer temporary bonding with self-alignment by patterned FDTS layer for size-free MEMS integration

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