Chip to wafer temporary bonding with self-alignment by patterned FDTS layer for size-free MEMS integration

Lu, Jian; Takagi, Hideki; Maeda, Ryutaro

doi:10.1109/icsens.2011.6126924

Cited by 8 publications

(5 citation statements)

References 12 publications

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“…Computational fluid dynamics (CFD) simulations facilitate the understanding and prediction of such two-phase flows for flexible and accurate fluid motion and position control; the result can be used to optimally design microfluidic devices, machineries, and fabrication processes (2)- (4) . It is often difficult to experimentally observe such flows, measure the flow variables (velocity, pressure, etc.)…”

Section: Introductionmentioning

confidence: 99%

Phase-Field Model-Based Simulation of Motions of a Two-Phase Fluid on Solid Surface

Tsuji

Matsumoto

2013

JCST

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A preliminary numerical simulation of the microscopic two-phase fluid motion on a solid surface was conducted using an interface-tracking method based on the phase-field model (PFM). Two variations of the lattice Boltzmann method (LBM) based on fictitious particle kinematics are proposed for solving diffuse-interface advection equations which were revised to improve volume-of-fluid conservation in the PFM simulations. The major findings are as follows: (1) the interface-tracking method accurately predicted the capillary force effect on dynamic two-phase fluid systems with a high density ratio between parallel plates; (2) the initial shape and volume of the two-phase fluid were retained adequately in linear translation with the use of the LBMs. These results proved that the PFM-based method and the LBM-based advection schemes can be used for simulating two-phase fluid motions in various macro-and microfluidics problems for devices, machineries and higher-throughput microdevice fabrication processes.

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Section: Introductionmentioning

confidence: 99%

Phase-Field Model-Based Simulation of Motions of a Two-Phase Fluid on Solid Surface

Tsuji

Matsumoto

2013

JCST

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“…Vapour deposition of the FDTS fine pattern on the SiO 2 /Si substrate was developed in our previous study and the details were published elsewhere [12]. In this work, sputtered Pt/Ti with a thickness of 200/50 nm was used as the PZT bottom electrode.…”

Section: Methodsmentioning

confidence: 99%

“…Perfluorodecyltrichlorosilane (FDTS, CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 ) is a long chain perfluoronated silane self‐assembled monolayer (SAM) for producing hydrophobic surfaces, which have an ultra‐low thickness of only several nanometers and easily decompose by deep‐UV light or O 2 plasma treatment. A lift‐off process of FDTS fine pattern was developed in our previous study for rapid and highly accurate chip to wafer self‐alignment and temporary bonding [12]. In this work, a lift‐off processed FDTS fine pattern was introduced to create hydrophobic surfaces on the Pt/Ti/SiO 2 /Si substrate, where the interaction between the following spin‐coated sol–gel PZT precursor and the Pt/Ti bottom electrode was blocked during the PZT high‐temperature annealing.…”

Section: Introductionmentioning

confidence: 99%

Lift‐off process of piezoelectric lead–zirconate–titanate thin film using self‐assembled monolayer as sacrificial layer

Takagi

Maeda

2013

Micro & Nano Letters

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In this work, a hydrophobic self-assembled monolayer, perfluorodecyltrichlorosilane (FDTS) (CF 3 (CF 2) 7 (CH2) 2 SiCl 3), was proposed as a sacrificial layer for a lift-off process of a piezoelectric lead-zirconate-titanate (PZT) thin film on a Pt/Ti/SiO 2 /Si substrate. A FDTS fine pattern was firstly vapour deposited on a Pt/Ti/SiO 2 /Si substrate by a lift-off process, and then the PZT precursor was spin-coated on the Pt/Ti/SiO 2 /Si substrate, post-baked so the solvent decomposed and evaporated and annealed for crystallisation. The experimental results demonstrated that the super-hydrophobic FDTS with a contact angle of >120°is effective in preventing PZT crystallisation because of its thermal stability during PZT post-baking, and its barrier-effects between the spin-coated PZT precursor and the Pt/Ti substrate. After removing the FDTS and the PZT which is on top of the FDTS by a second lift-off process using ultrasonic agitation, a PZT fine pattern was successfully obtained on the Pt/Ti/SiO 2 /Si substrate with a thickness of 200-300 nm and feature size of a few tens of microns. In this Letter, the hydrophobic properties and surface morphology of different types of FDTS were studied and its barrier-effect on PZT crystallisation were analysed. The effects of PZT thickness in each spin-coating to lift-off the and PZT properties were investigated. The obtained PZT pattern was evaluated by an X-ray diffraction measurement.

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“…pump, inkjet, reactor, liquid lens, etc.) and micro-electro-mechanical-systems (MEMS) device fabrication processes can be optimally designed [2][3][4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

A Diffuse-Interface Tracking Method for the Numerical Simulation of Motions of a Two-Phase Fluid on a Solid Surface

Tsuji

Matsumoto

2014

The Journal of Computational Multiphase Flows

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Applicability of two kinds of computational-fluid-dynamics method adopting Cahn-Hilliard (CH) and Allen-Cahn (AC)-type diffuse-interface advection equations based on a phase-field model (PFM) is examined to simulation of motions of microscopic incompressible two-phase fluid on solid surface. A capillarity-driven gas-liquid motion in rectangular channel is simulated by use of a PFM method for solving Navier-Stokes (NS) equations and a CH equation, whereas an immiscible liquid-liquid flow in a microchannel with T-junction and square cross section is simulated by use of another PFM method proposed in this study, which adopts a lattice-Boltzmann method based on fictitious particles kinematics as numerical scheme for solving NS equations and an AC equation that is modified to improve volume-of-fluid conservation. The major findings are as follows: (1) effect of capillary force on the dynamic two-phase fluid system with a high density ratio is well predicted for cross-sectional aspect ratio of the channel = 1 and 2; (2) mono-dispersed slug flow pattern transition is reproduced in good agreement with experimental observations in terms of variation in length and interval of droplets as increasing their volumetric flow rates at a constant flow rate ratio = 1. These results prove that the PFM methods can be used for analyzing two-phase fluid motions in various microfluidic devices and micro fabrication processes. I I 2 284 A Diffuse-interface Tracking Method for the Numerical Simulation of Motions of a Two-phase Fluid on a Solid Surface

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Chip to wafer temporary bonding with self-alignment by patterned FDTS layer for size-free MEMS integration

Cited by 8 publications

References 12 publications

Phase-Field Model-Based Simulation of Motions of a Two-Phase Fluid on Solid Surface

Phase-Field Model-Based Simulation of Motions of a Two-Phase Fluid on Solid Surface

Lift‐off process of piezoelectric lead–zirconate–titanate thin film using self‐assembled monolayer as sacrificial layer

A Diffuse-Interface Tracking Method for the Numerical Simulation of Motions of a Two-Phase Fluid on a Solid Surface

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