Aluminum Nitride Lamb-Wave Resonators for High-Power High-Frequency Applications

Campanella, Humberto; Khine, Lynn; Tsai, J. M.

doi:10.1109/led.2012.2230609

Cited by 23 publications

(10 citation statements)

References 7 publications

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“…Three piezoelectric materials hold significant promise for power conversion: Lead Zirconate Titanate (PZT) ceramics, Lithium Niobate, and Aluminum Nitride [29], [30], [31], [4]. In Table III we compare the properties of these three materials 2 .…”

Section: Resonator Design and Fabrication A Materials And Resonanmentioning

confidence: 99%

“…This represents an upper bound for kt under the optimal boundary conditions. Aluminum Nitride has a low mechanical loss but a low k 2 t , its main advantage is that it can be deposited as part of a CMOS compatible process flow, allowing for a high degree of integration with IC processes [4], [29].…”

Section: Resonator Design and Fabrication A Materials And Resonanmentioning

confidence: 99%

“…Common piezoelectric resonant modes for bulk devices include radial mode, shear mode, lateral mode, and thickness resonant modes [33], [34], [30], [27]. Most of these resonant modes can also be applied in MEMS scale devices, along with other resonant modes such as lamb wave [29], [36], [31], [35]. Of these resonant modes, radial mode resonators operate at a low frequency for a given size, providing a high impedance and limited power density.…”

Section: Resonator Design and Fabrication A Materials And Resonanmentioning

confidence: 99%

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Optimized Resonators for Piezoelectric Power Conversion

Braun

Stolt

et al. 2021

IEEE Open J. Power Electron.

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The performance of inductors at high frequencies and small sizes is one of the largest limiting factors in the continued miniaturization of dc-dc converters. Piezoelectric resonators can have a very high quality factor and provide an inductive impedance between their series and parallel resonant frequencies, making them a promising technology for further miniaturizing dc-dc converters. In this paper we analyze the impact of resonator parameters on the performance of the piezoelectric resonator based dc-dc converter, derive the optimal load impedance and efficiency limits, and analyze the impacts of varying conversion ratio and load impedance. This work is accompanied by a prototype dc-dc converter using a piezoelectric resonator fabricated from lithium niobate. The piezoelectric resonator has a quality factor of 4178 and a coupling coefficient, k 2 t , of 29%. The converter is able to achieve high efficiency zero voltage switching and a continuously variable conversion ratio without the use of any discrete inductors. It achieves a maximum power output of 30.9 W at an efficiency of 95.2% with a power density of 6.76 W cm 3 .

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Section: Resonator Design and Fabrication A Materials And Resonanmentioning

confidence: 99%

Section: Resonator Design and Fabrication A Materials And Resonanmentioning

confidence: 99%

Section: Resonator Design and Fabrication A Materials And Resonanmentioning

confidence: 99%

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Optimized Resonators for Piezoelectric Power Conversion

Braun

Stolt

et al. 2021

IEEE Open J. Power Electron.

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“…These materials are now predominantly used instead of quartz not only because they have more advantageous costs, but also because of their different piezoelectric properties, which ‒for the latter PbZr x Ti 1−x O 3 family‒ can also be changed by adjusting the composition of the material, and can also exhibit other useful sensing properties, e.g., pyroelectricity. Moreover, SAW sensors can also be realized as thin-film bulk acoustic resonators (FBARs or TFBARs) using the previous materials or others, such as aluminum nitride (AlN) and zinc oxide (ZnO), which can be easily coated on top of other devices or materials, such as Si wafers, thus offering better capability of integration in LOC smart systems [51,52,53,54,55,56] and/or with signal processing integrated circuits (ICs).While a great number of both QCM & SAW realizations have been reported, here just a few relevant illustrative examples will be given.…”

Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

Microfluidic and Micromachined/MEMS Devices for Separation, Discrimination and Detection of Airborne Particles for Pollution Monitoring

Poenar

2019

Micromachines

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Most of the microfluidics-related literature describes devices handling liquids, with only a small part dealing with gas-based applications, and a much smaller number of papers are devoted to the separation and/or detection of airborne inorganic particles. This review is dedicated to this rather less known field which has become increasingly important in the last years due to the growing attention devoted to pollution monitoring and air quality assessment. After a brief introduction summarizing the main particulate matter (PM) classes and the need for their study, the paper reviews miniaturized devices and/or systems for separation, detection and quantitative assessment of PM concentration in air with portable and easy-to-use platforms. The PM separation methods are described first, followed by the key detection methods, namely optical (scattering) and electrical. The most important miniaturized reported realizations are analyzed, with special attention given to microfluidic and micromachined or micro-electro-mechanical systems (MEMS) chip-based implementations due to their inherent capability of being integrated in lab-on-chip (LOC) type of smart microsystems with increased functionalities that can be portable and are easy to use. The operating principles and (when available) key performance parameters of such devices are presented and compared, also highlighting their advantages and disadvantages. Finally, the most relevant conclusions are discussed in the last section.

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“…2. The resona structural layer with molydbdenum ( electrodes [14]. Same slab of AlN is used t array that surrounds the resonator area.…”

Section: Introductionmentioning

confidence: 99%

Integration of RF MEMS resonators and phononic crystals for high frequency applications with frequency-selective heat management and efficient power handling

Campanella

Wang

Narducci

et al. 2014

2014 IEEE International Electron Devices Meeting

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We report a radio frequency micro electromechanical system (RFMEMS) device integrated with phononic crystals (PnC) that provide a Lamb-wave resonator with frequency-selective heat management, power handling capability, and more efficient electromechanical coupling at ultra high frequency (UHF) and low microwave bands. The integrated device is fabricated in a silicon-on-insulator (SOI) aluminum nitride (AlN) platform and boosts thermal performance by 40%, power handling by 3 dB, and coupling coefficient by three times. Design approach is scalable to higher frequencies.

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Aluminum Nitride Lamb-Wave Resonators for High-Power High-Frequency Applications

Cited by 23 publications

References 7 publications

Optimized Resonators for Piezoelectric Power Conversion

Optimized Resonators for Piezoelectric Power Conversion

Microfluidic and Micromachined/MEMS Devices for Separation, Discrimination and Detection of Airborne Particles for Pollution Monitoring

Integration of RF MEMS resonators and phononic crystals for high frequency applications with frequency-selective heat management and efficient power handling

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