All-Quartz High Accuracy MEMS Pressure Sensor Based on Double-Ended Tuning Fork Resonator

Wang, J.; Zhao, Cong; Zhao, G.H.; Jin, Xiao; Zhang, S.M.; Zou, Jiang

doi:10.1016/j.proeng.2015.08.732

Cited by 20 publications

(4 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…While there are many types of quartz resonant devices, most quartz sensors, such as accelerometers and pressure sensors, use double-ended tuning forks or double-clamped single beams 41 , 42 ; as such, we have applied those designs in this fabrication experiment. Examples of the quartz shapes as fabricated by our FLICE process are presented in Figs.…”

Section: Methodsmentioning

confidence: 99%

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Linden

Melech

Sakaev³

et al. 2023

Microsyst Nanoeng

View full text Add to dashboard Cite

A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz. The main processing steps include femtosecond UV laser treatment of a Cr-Au-coated Z-cut alpha quartz wafer, followed by wet etching. The laser-patterned Cr-Au coating serves as an etch mask and is used to form electrodes for piezoelectric actuation. This fabrication approach does not alter the quartz’s crystalline structure or its piezo-electric properties. The formation of defects, which is common in laser micromachined quartz, is prevented by optimized process parameters and by controlling the temporal behavior of the laser-matter interactions. The process does not involve any lithography and allows for high geometric design flexibility. Several configurations of piezoelectrically actuated beam-type resonators were fabricated using relatively mild wet etching conditions, and their functionality was experimentally demonstrated. The devices are distinguished from prior efforts by the reduced surface roughness and improved wall profiles of the fabricated quartz structures.

show abstract

Section: Methodsmentioning

confidence: 99%

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Linden

Melech

Sakaev³

et al. 2023

Microsyst Nanoeng

View full text Add to dashboard Cite

show abstract

“…However, these methods have their own drawbacks in the compensation processes. Wang, J. et al reported a resonant pressure sensor that employs a temperature sensor for temperature compensation [19,20]. This method is only suitable for a slowly varying temperature.…”

Section: Introductionmentioning

confidence: 99%

A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor

Han,

Yuan,

Feng

et al. 2024

Sensors

View full text Add to dashboard Cite

This paper reports a self-temperature compensation barometer based on a quartz resonant pressure sensor. A novel sensor chip that contains a double-ended tuning fork (DETF) resonator and a single-ended tuning fork (SETF) resonator is designed and fabricated. The two resonators are designed on the same diaphragm. The DETF resonator works as a pressure sensor. To reduce the influence of the temperature drift, the SETF resonator works as a temperature compensation sensor, which senses the instantaneous temperature of the DETF resonator. The temperature compensation method based on polynomial fitting is studied. The experimental results show that the accuracy is 0.019% F.S. in a pressure range of 200~1200 hPa over a temperature range of −20 °C~+60 °C. The absolute errors of the barometer are within ±23 Pa. To verify its actual performance, a drone flight test was conducted. The test results are consistent with the actual flight trajectory.

show abstract

“…Resonant pressure sensors became the most attractive candidates for high-precision pressure measurements. A variety of structures and fabrication processes were proposed to improve the performance of resonant pressure sensors, including the quality factor, sensitivity, and so on, but few resonant pressure sensors have been successfully commercialized [4][5][6][7][14][15][16][17][18][19][20][21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

High-accuracy differential resonant pressure sensor with linear fitting method

Han¹,

Zhao²,

Wang³

et al. 2021

J. Micromech. Microeng.

View full text Add to dashboard Cite

A high-accuracy differential resonant pressure sensor with two similar resonators is proposed using the linear fitting method to guarantee its output linearity without polynomial compensation. Results reveal that the nonlinearity of the differential resonant pressure sensor is largely dependent on the tensile/compressive sensor pressure–stress ratio c when two similar resonators are used separately as compressive and tensile elements. Nonlinearity decreases sharply with an appropriate ratio c. A theoretical model is proposed to obtain minimal nonlinearity and shows satisfactory agreement with the simulation results. The impact factors of ratio c are analyzed to facilitate adjustments with the designed value. Moreover, micromachining methods are used to fabricate sensing chips. Experiment results show that the nonlinearity and measurement sensitivity of the proposed differential resonant pressure sensor are ±0.02% FS and 35.5 Hz kPa−1 with the linear fitting method in a pressure range of 0–200 kPaA and temperature range of −40 °C to +40 °C. The differential linear fitting method largely decreases compensation complexity without polynomial fitting for high-precision pressure measurement.

show abstract

All-Quartz High Accuracy MEMS Pressure Sensor Based on Double-Ended Tuning Fork Resonator

Cited by 20 publications

References 6 publications

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor

High-accuracy differential resonant pressure sensor with linear fitting method

Contact Info

Product

Resources

About