High-accuracy differential resonant pressure sensor with linear fitting method

Han, Xiangguang; Zhao, Libo; Wang, Jiuhong; Wang, Li; Huang, Mimi; Chen, Cuilan; Yang, Ping; Li, Zhikang; Zhu, Nan; Wang, Songli; Yan, Xin; Wang, Yonglu; Wang, Hongyan; Wu, Yongshun; Chen, Yao; Jiang, Zhuangde

doi:10.1088/1361-6439/abe20c

Cited by 9 publications

(6 citation statements)

References 30 publications

(54 reference statements)

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“…c Digital control system for frequency signals 98 . d Block diagram of the adaptive control technique 95 . e CMOS phase-locked loop-driving circuit 59 .…”

Section: Rpsmentioning

confidence: 99%

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Han,

Huang,

et al. 2023

Microsyst Nanoeng

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Pressure sensors play a vital role in aerospace, automotive, medical, and consumer electronics. Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher sensitivity, higher accuracy, better multifunctionality, smaller chip size, and smaller package size, have recently emerged. The demand for performance upgradation has led to breakthroughs in sensor materials, design, fabrication, and packaging methods, which have emerged frequently in recent decades. This paper reviews common new trends in MEMS pressure sensors, including minute differential pressure sensors (MDPSs), resonant pressure sensors (RPSs), integrated pressure sensors, miniaturized pressure chips, and leadless pressure sensors. To realize an extremely sensitive MDPS with broad application potential, including in medical ventilators and fire residual pressure monitors, the “beam-membrane-island” sensor design exhibits the best performance of 66 μV/V/kPa with a natural frequency of 11.3 kHz. In high-accuracy applications, silicon and quartz RPS are analyzed, and both materials show ±0.01%FS accuracy with respect to varying temperature coefficient of frequency (TCF) control methods. To improve MEMS sensor integration, different integrated “pressure + x” sensor designs and fabrication methods are compared. In this realm, the intercoupling effect still requires further investigation. Typical fabrication methods for microsized pressure sensor chips are also reviewed. To date, the chip thickness size can be controlled to be <0.1 mm, which is advantageous for implant sensors. Furthermore, a leadless pressure sensor was analyzed, offering an extremely small package size and harsh environmental compatibility. This review is structured as follows. The background of pressure sensors is first presented. Then, an in-depth introduction to MEMS pressure sensors based on different application scenarios is provided. Additionally, their respective characteristics and significant advancements are analyzed and summarized. Finally, development trends of MEMS pressure sensors in different fields are analyzed.

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“…c Digital control system for frequency signals 98 . d Block diagram of the adaptive control technique 95 . e CMOS phase-locked loop-driving circuit 59 .…”

Section: Rpsmentioning

confidence: 99%

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Han,

Huang,

et al. 2023

Microsyst Nanoeng

Self Cite

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“…However, thicker diaphragms may reduce the conversion ratio, thereby sacrificing sensitivity to varying degrees. To achieve a higher sensitivity, Han X et al [9] proposed a high-precision differential resonator. The lower thickness of the sensitive diaphragm (75 µm) resulted in a high sensitivity of 35.5 Hz/kPa, but the low stiffness of the diaphragm made the structure fragile.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of MEMS Resonant Pressure Sensors with Wide Range and High Sensitivity Based on BP and NSGA-II

Lv,

Li,

Miao

et al. 2024

Micromachines

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With the continuous progress of aerospace, military technology, and marine development, the MEMS resonance pressure sensor puts forward the requirements of not only a wide range but also high sensitivity. However, traditional resonators are hardly compatible with both. In response, we propose a new sensor structure. By arranging the resonant beam and the sensitive diaphragm vertically in space, the new structure improves the rigidity of the diaphragm without changing the thickness of the diaphragm and achieves the purpose of increasing the range without affecting the sensitivity. To find the optimal structural parameters for the sensor sensitivity and range, and to prevent the effects of modal disturbances, we propose a multi-objective optimization design scheme based on the BP and NSGA-II algorithms. The optimization of the structure parameters not only improved the sensitivity but also increased the interference frequency to solve the issue of mode interference. The optimized structure achieves a sensitivity and range of 4.23 Hz/kPa and 1–10 MPa, respectively. Its linear influence factor is 38.07, significantly higher than that of most resonant pressure sensors. The structural and algorithmic optimizations proposed in this paper provide a new method for designing resonant pressure sensors compatible with a wide range and high sensitivity.

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“…Thus, the sensor input-output's relationship can be solved using interpolation or least square approximation to define polynomial function for such a set of data in order to reach an efficient and accurate outcome (e.g. [23,[30][31][32][33][34][35]). Lagrange interpolation (LI) method is a proper choice for low-cost calibration scheme where the order of polynomial is higher degree.…”

Section: Introductionmentioning

confidence: 99%

Calibration approach to quantify nonlinearity of MEMS pore pressure sensors using optimal interpolation

Barzegar¹,

Tadich²,

Sainsbury³

et al. 2022

Meas. Sci. Technol.

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MEMS-based instruments have become more attractive in recent years for many industries, particularly geotechnical monitoring owing to their small size and low capital cost. However, overcoming nonlinearity errors is a major concern to ensure accuracy, precision, and repeatability of measurement. Nonlinearity error in measuring instruments can be solved using polynomial function of different degree based on severity of error. In this study, Lagrange polynomial fitting method is applied for nonlinearity calibration of a newly developed MEMS pore pressure sensor by means of optimum calibration points. A procedure for optimum selection of the calibration points to get the best calibration characteristics of a pore pressure sensor is investigated. For this work, the calibration characteristics are evaluated by Lagrange interpolation using special set of Chebyshev nodes, D, A and R-optimum points. The D-A-R optimum points are constructed by Imperialist Competitive Algorithm (ICA). The value of the optimal approach is also compared with a uniform approach using equidistant points through actual readings. The results show the increased accuracy and precision of measurement using optimum approach. This increased accuracy allows the application of MEMs to sense smaller changes in pore pressure readings providing unique opportunity for passive estimation of subsurface properties.

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High-accuracy differential resonant pressure sensor with linear fitting method

Cited by 9 publications

References 30 publications

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Design and Optimization of MEMS Resonant Pressure Sensors with Wide Range and High Sensitivity Based on BP and NSGA-II

Calibration approach to quantify nonlinearity of MEMS pore pressure sensors using optimal interpolation

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