Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Linden, John; Melech, Neta; Sakaev, Igor; Fogel, Ofer; Krylov, Slava; Nuttman, D.; Zalevsky, Zeev; Sirota, M.

doi:10.1038/s41378-023-00511-5

Cited by 4 publications

(2 citation statements)

References 48 publications

(31 reference statements)

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“…Laser-modified surfaces can improve the adhesion of electronic components or create specialized surfaces for MEMS and sensors [76]. The study in [77] introduced a novel technology for precision manufacturing of quartz resonators for MEMS. This approach relies on laser-induced chemical etching of quartz.…”

Section: Laser Modification For Smart Materialsmentioning

confidence: 99%

Fabrication of Smart Materials Using Laser Processing: Analysis and Prospects

Murzin,

Stiglbrunner

2023

Applied Sciences

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Laser processing is a versatile tool that enhances smart materials for diverse industries, allowing precise changes in material properties and customization of surface characteristics. It drives the development of smart materials with adaptive properties through laser modification, utilizing photothermal reactions and functional additives for meticulous control. These laser-processed smart materials form the foundation of 4D printing that enables dynamic shape changes depending on external influences, with significant potential in the aerospace, robotics, health care, electronics, and automotive sectors, thus fostering innovation. Laser processing also advances photonics and optoelectronics, facilitating precise control over optical properties and promoting responsive device development for various applications. The application of computer-generated diffractive optical elements (DOEs) enhances laser precision, allowing for predetermined temperature distribution and showcasing substantial promise in enhancing smart material properties. This comprehensive overview explores the applications of laser technology and nanotechnology involving DOEs, underscoring their transformative potential in the realms of photonics and optoelectronics. The growing potential for further research and practical applications in this field suggests promising prospects in the near future.

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Section: Laser Modification For Smart Materialsmentioning

confidence: 99%

Fabrication of Smart Materials Using Laser Processing: Analysis and Prospects

Murzin,

Stiglbrunner

2023

Applied Sciences

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“…Quartz crystals, being a unique material, demonstrate stable properties over a broad temperature range, along with distinctive piezoelectric characteristics. This facilitates integrating drive and sensing electrodes within a single resonator, thus minimizing alignment errors common in high-end sensors [ 7 ]. Consequently, quartz is widely used in manufacturing MEMS devices [ 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

Etching Rate Analysis Model Based on Quartz Bond Angle Characteristics

Zhao,

Lv,

Song

et al. 2024

Micromachines

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This paper proposes a method for classifying crystal planes based on the bond angle characteristics of quartz unit cells and constructs an etch rate model for quartz crystal planes at both macro and micro scales. By omitting oxygen atoms from the quartz cell structure, a method based on bond angle characteristics was established to partition the atomic arrangement of the crystal surface. This approach was used to analyze the etching processes of typical quartz crystal planes (R, r, m, and (0001)), approximating the etching process of crystals as a cyclic removal of certain bond angle characteristics on the crystal planes. This led to the development of an etch rate model based on micro-geometric parameters of crystal planes. Additionally, using the proposed bond angle classification method, the common characteristics of atomic configurations on the crystal plane surfaces within the X_cut type were extracted and classified into seven regions, further expanding and applying the etch rate model. The computational results of this model showed good agreement with experimental data, indicating the rationality and feasibility of the proposed method. These also provide a theoretical basis for understanding the microstructural changes during quartz-based MEMS etching processes.

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Etching of quartz crystals in liquid phase environment: A review

Dong,

Zhou,

Huang

et al. 2024

Nanotechnology and Precision Engineering

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Quartz crystals are the most widely used material in resonant sensors, owing to their excellent piezoelectric and mechanical properties. With the development of portable and wearable devices, higher processing efficiency and geometrical precision are required. Wet etching has been proven to be the most efficient etching method for large-scale production of quartz devices, and many wet etching approaches have been developed over the years. However, until now, there has been no systematic review of quartz crystal etching in liquid phase environments. Therefore, this article provides a comprehensive review of the development of wet etching processes and the achievements of the latest research in this field, covering conventional wet etching, additive etching, laser-induced backside wet etching, electrochemical etching, and electrochemical discharge machining. For each technique, a brief overview of its characteristics is provided, associated problems are described, and possible solutions are discussed. This review should provide an essential reference and guidance for the future development of processing strategies for the manufacture of quartz crystal devices.

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Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

Cited by 4 publications

References 48 publications

Fabrication of Smart Materials Using Laser Processing: Analysis and Prospects

Fabrication of Smart Materials Using Laser Processing: Analysis and Prospects

Etching Rate Analysis Model Based on Quartz Bond Angle Characteristics

Etching of quartz crystals in liquid phase environment: A review

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