Advances in silicon-on-insulator optoelectronics

Jalali, Bahram; Yegnanarayanan, Siva; Yoon, Ty; Yoshimoto, Tomomi; Rendina, Ivo; Coppinger, F.

doi:10.1109/2944.736081

Cited by 175 publications

(79 citation statements)

References 49 publications

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“…All the optical and MEMS components are monolithically integrated on an SOI substrate with a 5-µm-thick device layer. The SOI platform is attractive because they are compatible with Si PLC [160] as well as SOI-MEMS [24] technologies. All optical paths are defined by photolithography, and no optical alignment is necessary.…”

Section: B Monolithic Wss and Wsxcmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

301

141

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Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

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Section: B Monolithic Wss and Wsxcmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

301

141

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“…This vision is to a large extent in agreement with the state of the art, as seen throughout this paper. Figure 2 eloquently shows the importance and advantages of the versatile silicon-on-insulator (SOI) waveguide platform [11], which has been progressing rapidly since 1991 [21,22]. The SOI platform has effectively become the benchmark platform for silicon photonics and several devices and photonic integrated circuits have been implemented on it since the mid-1990s [23][24][25][26][27].…”

Section: Can Silicon Homogenize Integrated Photonics?mentioning

confidence: 99%

“…S aveguid e S µ µ Figure 2 Advantage of the SOI waveguides in size compatibility with CMOS electronics, as opposed to silica waveguides [11].…”

Section: Silica Waveguidementioning

confidence: 99%

“…The argued advantages of silicon over III-V OEICs have been the possibility of demonstrating much more compact optical waveguides with lower optical propagation loss, better processing yield, low cost and the potential compatibility with CMOS electronics. Several review papers [11][12][13][14][15] and books [16][17][18][19][20], have been written on silicon photonics, including some works by this author. For completeness, the basics of this exciting technology are briefly reviewed in the next paragraphs.…”

Section: Can Silicon Homogenize Integrated Photonics?mentioning

confidence: 99%

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Emerging heterogeneous integrated photonic platforms on silicon

Fathpour

2015

Nanophotonics

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Silicon photonics has been established as a mature and promising technology for optoelectronic integrated circuits, mostly based on the silicon-on-insulator (SOI) waveguide platform. However, not all optical functionalities can be satisfactorily achieved merely based on silicon, in general, and on the SOI platform, in particular. Long-known shortcomings of silicon-based integrated photonics are optical absorption (in the telecommunication wavelengths) and feasibility of electrically-injected lasers (at least at room temperature). More recently, high two-photon and free-carrier absorptions required at high optical intensities for third-order optical nonlinear effects, inherent lack of second-order optical nonlinearity, low extinction ratio of modulators based on the freecarrier plasma effect, and the loss of the buried oxide layer of the SOI waveguides at mid-infrared wavelengths have been recognized as other shortcomings. Accordingly, several novel waveguide platforms have been developing to address these shortcomings of the SOI platform. Most of these emerging platforms are based on heterogeneous integration of other material systems on silicon substrates, and in some cases silicon is integrated on other substrates. Germanium and its binary alloys with silicon, III-V compound semiconductors, silicon nitride, tantalum pentoxide and other high-index dielectric or glass materials, as well as lithium niobate are some of the materials heterogeneously integrated on silicon substrates. The materials are typically integrated by a variety of epitaxial growth, bonding, ion implantation and slicing, etch back, spin-on-glass or other techniques. These wide range of efforts are reviewed here holistically to stress that there is no pure silicon or even group IV photonics per se. Rather, the future of the field of integrated photonics appears to be one of heterogenization, where a variety of different materials and waveguide platforms will be used for different purposes with the common feature of integrating them on a single substrate, most notably silicon.

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“…It is cheaper than the compound semiconductor (GaAs or InP) substrates to fabricate wide range of optical devices(light emitters, photo detectors, optical switches, optical passive components, and nonlinear optic devices, logic gates) [8][9][10][11], small size and lower excess loss [1,2]. Using coupling effect on SOI waveguide small size and individual output design of basic logic gates can be obtain [1,2] The purpose of this article is to compare different structures and methods had been used for optical logic gates.…”

Section: Introductionmentioning

confidence: 99%

A Review on System on Chip Optical Logic Gates

2014

IJAERD

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Advances in silicon-on-insulator optoelectronics

Cited by 175 publications

References 49 publications

Optical MEMS for Lightwave Communication

Optical MEMS for Lightwave Communication

Emerging heterogeneous integrated photonic platforms on silicon

A Review on System on Chip Optical Logic Gates

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