Optical MEMS for Lightwave Communication

Wu, M.C.; Solgaard, Olav; Ford, Joseph E.

doi:10.1109/jlt.2006.886405

Cited by 303 publications

(152 citation statements)

References 177 publications

(192 reference statements)

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“…6 As such, metasurfaces promise unparalleled applications in sensing, 2 imaging, 7 and communications. 8 To ensure that the functionality of metasurfaces can be harnessed for real-world applications, the ability to tune their response becomes important. 9 The inherent resonant nature of metasurfaces allows their electromagnetic responses to be tuned in many different ways.…”

Section: Abstract: Nanophotonics · Stretchable Electronics · Subwavelmentioning

confidence: 99%

Mechanically Tunable Dielectric Resonator Metasurfaces at Visible Frequencies

Gutruf¹,

et al. 2015

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Devices that manipulate light represent the future of information processing. Flat optics and structures with subwavelength periodic features (metasurfaces) provide compact and efficient solutions. The key bottleneck is efficiency, and replacing metallic resonators with dielectric resonators has been shown to significantly enhance performance. To extend the functionalities of dielectric metasurfaces to real-world optical applications, the ability to tune their properties becomes important. In this article, we present a mechanically tunable all-dielectric metasurface. This is composed of an array of dielectric resonators embedded in an elastomeric matrix. The optical response of the structure under a uniaxial strain is analyzed by mechanical−electromagnetic co-simulations. It is experimentally demonstrated that the metasurface exhibits remarkable resonance shifts. Analysis using a Lagrangian model reveals that strain modulates the near-field mutual interaction between resonant dielectric elements. The ability to control and alter inter-resonator coupling will position dielectric metasurfaces as functional elements of reconfigurable optical devices.

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Section: Abstract: Nanophotonics · Stretchable Electronics · Subwavelmentioning

confidence: 99%

Mechanically Tunable Dielectric Resonator Metasurfaces at Visible Frequencies

Gutruf¹,

et al. 2015

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“…Optical systems with mechanically adjustable or controllable components are well known in the form of silicon chip based micro-and nano-electromechanical systems (MEMS and NEMS) [1] and are widely used in various optoelectronic devices for sensing, such as in accelerometers and gyroscopes, for 2-D optical switching in displays [2], and for a multitude of applications in optical communications [3]. While semiconductors are the standard material for the manufacturing of MEMS, the potential of glass-based materials for developing MEMS has also been investigated [4], and several groups have already demonstrated electrostatic glass actuators [5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Design of dual-core optical fibers with NEMS functionality

Podoliak¹,

Loh²,

Horák³

2014

Opt. Express

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An optical fiber with nano-electromechanical functionality is presented. The fiber exhibits a suspended dual-core structure that allows for control of the optical properties via nanometer-range mechanical movements. We investigate electrostatic actuation achieved by applying a voltage to specially designed electrodes integrated in the cladding. Numerical and analytical calculations are preformed to optimize the fiber and electrode design. Based on this geometry an all-fiber optical switch is investigated; we find that optical switching of light between the two cores can be achieved in a 10 cm fiber with an operating voltage of 35 V.

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“…In optical communications, MEMS concept was introduced into various products to make them smaller, cheaper and better. Optical switches [116][117][118][119], optical attenuators [120], optical data modulators, filters, spectrometers [121] and tunable lasers [122] are some examples of optical MEMS devices. These devices have facilitated the rapid progress of the telecommunication industry.…”

Section: Optics and Photonicsmentioning

confidence: 99%

“…These devices have facilitated the rapid progress of the telecommunication industry. Furthermore, recent innovations such as microdisk resonators for multiplexing function [123], and photonic crystal technology for high-reflectivity compact mirrors [124] could further reduce the size and cost of the conventional devices [119].…”

Section: Optics and Photonicsmentioning

confidence: 99%

Review on Micro- and Nanolithography Techniques and their Applications

2012

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Abstract. This article reviews major micro-and nanolithography techniques and their applications from commercial micro devices to emerging applications in nanoscale science and engineering. Micro-and nanolithography has been the key technology in manufacturing of integrated circuits and microchips in the semiconductor industry. Such a technology is also sparking revolutionizing advancements in nanotechnology. The lithography techniques including photolithography, electron beam lithography, focused ion beam lithography, soft lithography, nanoimprint lithography and scanning probe lithography are discussed. Furthermore, their applications are summarized into four major areas: electronics and microsystems, medical and biotech, optics and photonics, and environment and energy harvesting.

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Optical MEMS for Lightwave Communication

Cited by 303 publications

References 177 publications

Mechanically Tunable Dielectric Resonator Metasurfaces at Visible Frequencies

Mechanically Tunable Dielectric Resonator Metasurfaces at Visible Frequencies

Design of dual-core optical fibers with NEMS functionality

Review on Micro- and Nanolithography Techniques and their Applications

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