Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect

Stuerzebecher, Lorenz; Harzendorf, Torsten; Vogler, Uwe; Zeitner, Uwe D.; Voelkel, Reinhard

doi:10.1364/oe.18.019485

Cited by 78 publications

(42 citation statements)

References 14 publications

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“…Examples are for the measurements of the refractive index [3], for sensing a distance or a displacement [4], for laser resonators [5,6], lithography [7], array illumination [8], sub-wavelength focusing [9], imaging [10], lensless image synthesis [11] and 2D optical correlator [12]. Such appealing applications draw attention and led to intensive investigations; both experimentally and theoretically.…”

Section: Introductionmentioning

confidence: 99%

Phase anomalies in Talbot light carpets of self-images

Kim¹,

Scharf²,

Menzel³

et al. 2013

Opt. Express

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An interesting feature of light fields is a phase anomaly, which occurs on the optical axis when light is converging as in a focal spot. Since in Talbot images the light is periodically confined in both transverse and axial directions, it remains an open question whether at all and to which extent the phase in the Talbot images sustains an analogous phase anomaly. Here, we investigate experimentally and theoretically the anomalous phase behavior of Talbot images that emerge from a 1D amplitude grating with a period only slightly larger than the illumination wavelength. Talbot light carpets are observed close to the grating. We concisely show that the phase in each of the Talbot images possesses an anomalous axial shift. We show that this phase shift is analogous to a Gouy phase of a converging wave and occurs due to the periodic light confinement caused by the interference of various diffraction orders. Longitudinal-differential interferometry is used to directly demonstrate the axial phase shifts by comparing Talbot images phase maps to a plane wave. Supporting simulations based on rigorous diffraction theory are used to explore the effect numerically. Numerical and experimental results are in excellent agreement. We discover that the phase anomaly, i.e., the difference of the phase of the field behind the grating to the phase of a referential plane wave, is an increasing function with respect to the propagation distance. We also observe within one Talbot length an irregular wavefront spacing that causes a deviation from the linear slope of the phase anomaly. We complement our work by providing an analytical model that explains these features of the axial phase shift. References and links1. F. Talbot, "Facts relating to optical science. No. IV," Philos. Mag. 9, 401-407 (1836). 2. L. Rayleigh, "On copying diffraction gratings and some phenomena connected therewith," Philos. Mag. 11(67), 196-205 (1881). 3. J. C. Bhattacharya, "Measurement of the refractive index using the Talbot effect and a moire technique," Appl.Opt. 28(13), 2600-2604 (1989). 4. G. Spagnolo, D. Ambrosini, and D. Paoletti, "Displacement measurement using the Talbot effect with a Ronchi grating," J. Opt. Soc. A 4(6), S376-S380 (2002). 5. J. R. Leger, M. L. Scott, and W. B. Veldkamp, "Coherent addition of AlGaAs lasers using microlenses and diffractive coupling," Appl. Phys. Lett. 52(21), 1771-1773 (1988). 6. J. R. Leger, "Lateral mode control of an AlGaAs laser array in a Talbot cavity," Appl. Phys. Lett. 55(4), 334-336 (1989 416-419 (1973). 11. E. Bonet, J. Ojeda-Castañeda, and A. Pons, "Imagesynthesis using the Laueffect," Opt. Commun. 81(5), 285-290 (1991). 12. J. C. Barreiro, P. Andrés, J. Ojeda-Castañeda, and J. Lancis, "Multiple incoherent 2D optical correlator," Opt.Commun. 84(5-6), 237-241 (1991). 13. R. F. Edgar, "The Fresnel diffraction images of periodic structures," J. Mod. Opt. 16, 281-287 (1969). 14. J. T. Winthrop and C. R. Worthington, "Theory of Fresnel images. I. Plane periodic objects in monochromatic light," J. Opt...

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Section: Introductionmentioning

confidence: 99%

Phase anomalies in Talbot light carpets of self-images

Kim¹,

Scharf²,

Menzel³

et al. 2013

Opt. Express

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show abstract

“…Enabled by the flexible incidence angle and collimation control, direct self-imaging (Fig. 6) and self-imaging with pinhole arrays [138] as well as gray-scale lithography by self-imaging [139] (both Fig. 7) were demonstrated in 2010.…”

Section: History and Trendsmentioning

confidence: 99%

“…NFH is limited to structures with very short periods but was studied extensively for this range [160][161]. Further geometries have been demonstrated by Talbot [135][136][137][138] and displacement Talbot lithography [149,150,153] as well as an early stage of RO-PSM technology [157]. Especially for applications in which substrates of poor quality are unavoidable, D-TL can by very interesting since high resolution lithography on strongly corrugated substrates is enabled.…”

Section: Applicationsmentioning

confidence: 99%

High-resolution proximity lithography for nano-optical components

Stuerzebecher

Fuchs

Zeitner

et al. 2015

Microelectronic Engineering

Self Cite

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“…Since self-imaging of periodic objects was first described by Talbot in 1836 [1], it has attracted much attention due to numerous applications ranging from displacement sensors [2] to laser resonators [3], lithography [4], array illumination [5] and splitter [6]. The selfimaging can be basically explained as a property of multimode waveguides by which an input field profile is reproduced in single or multiple images at regular intervals along the propagation direction [7].…”

Section: Introductionmentioning

confidence: 99%