Advanced fiber optical switches using deep RIE (DRIE) fabrication

Li, J.; Zhang, Q.X.; Liu, A.Q.

doi:10.1016/s0924-4247(02)00401-6

Cited by 95 publications

(54 citation statements)

References 6 publications

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“…Indeed, several micro-OBs with comparable optical paths have been reported in the literature in which integrating the 3D micromirror would reduce the optical losses or overcome the need for lensed fibers. [13][14][15][16]18,[38][39][40][41] It is also possible to incorporate multiple 3D mirrors with different radii of curvature on the same SOI substrate. The latter can be implemented either by exploiting the RIE-lag effect 36 or by the sequential application of the presented method while protecting the already-etched mirrors by the sidewall protection technique mentioned previously.…”

Section: D Micromirror Fabricationmentioning

confidence: 99%

Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light

et al. 2013

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Miniaturized optical benches process free-space light propagating in-plane with respect to the substrate and have a large variety of applications, including the coupling of light through an optical fiber. High coupling efficiency is usually obtained using assembled micro-optical parts, which considerably increase the system cost and integration effort. In this work, we report a high coupling efficiency, monolithically integrated silicon micromirror with controlled three-dimensional (3D) curvature that is capable of manipulating optical beams propagating in the plane of the silicon substrate. Based on our theoretical modeling, a spherical micromirror with a microscale radius of curvature as small as twice the Gaussian beam Rayleigh range provides a 100% coupling efficiency over a relatively long optical path range. Introducing dimensionless parameters facilitates the elucidation of the role of key design parameters, including the mirror's radii of curvature, independent of the wavelength. A micromachining method is presented for fabricating the 3D micromirror using fluorinated gas plasmas. The measured coupling efficiency was greater than 50% over a 200-mm optical path, compared to less than 10% afforded by a conventional flat micromirror, which was in good agreement with the model. Using the 3D micromirror, an optical cavity was formed with a round-trip diffraction loss of less than 0.4%, resulting in one order of magnitude enhancement in the measured quality factor. A nearly 100% coupling was also estimated when matching the sagittal and tangential radii of curvature of the presented micromirror's surface. The reported class of 3D micromirrors may be an advantageous replacement for the optical lenses usually assembled in silicon photonics and optical benches by transforming them into real 3D monolithic systems while achieving wideband high coupling efficiency over submillimeter distances.

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Section: D Micromirror Fabricationmentioning

confidence: 99%

Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light

et al. 2013

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“…Comb-drive actuators based on the principle of electrostatic forces have become a typical component in MEMS devices due to its low power consumption, high speed and good compatibility with microfabrication process [1]. Since the first time developed by Tang et al in 1989 [2], comb-drive actuators have be used in a variety of applications including tweezer [3], optical switch [4], micro-tribotester [5] and Micro XY-stage [6][7][8], etc.Generally, comb-drive actuators usually need a high drive voltage to achieve a large displacement.…”

Section: Introductionmentioning

confidence: 99%

Non-initial overlap bulk silicon comb-drive actuator with low-voltage and large-displacement

Cai

Hua

Qin

2016

MATEC Web of Conferences

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Abstract. Two different kinds of bulk-Si comb-drive actuators are designed in this work: initial overlap comb-drive actuator and non-initial overlap comb-drive actuator. They are fabricated by a simple post-CMOS bulk micromachining process. A cascade folded beam is designed to achieve large displacement at low driving voltages. And non-initial overlap and unequal wide comb fingers are used to reduce the side instability and improve the pull-in voltage. The measurement results show that the non-initial overlap comb-drive actuator improves the pull-in voltage by 73.3% than the initial overlap comb-drive actuator, and the maximum displacement of the non-initial overlap actuator is larger by 78.9% than that of the initial overlap actuator.

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“…In the past several decades, optical switches and modulators have been developed using nonlinear optic effects such as two-photon absorption, electro-optic (EO) effect, and cross phase modulation to realize ultrafast switching, but the needs of high pumping power, low modulation efficiency and costly short-pulse laser systems may limit their wide applications in optical networks [4][5][6]. Some other types of optical switches, such as subgroup of microelectromechanical systems (MEMS), have attracted lots of interests [7,8]. However, the control of these devices is mainly based on mechanical movement of micro-mirrors, and thus it suffers from the problem of mechanical reliability and repeatability.…”

Section: Introductionmentioning

confidence: 99%

Thermo-optic properties of epitaxial Sr_06Ba_04Nb_2O_6 waveguides and their application as optical modulator

Liu

Mak²,

Wong

2009

Opt. Express

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A prism-coupler technique was introduced to determine the refractive indices and thermo-optic coefficients of epitaxial Sr 0.6 Ba 0.4 Nb 2 O 6 (SBN) waveguides, in a temperature range covering the ferroelectricparaelectric phase transition. A strong enhancement in the TO coefficient is observed near T c . This strong enhancement is related to the critical change of the polarization. The values of / e dn dT are significantly larger than / o dn dT due to the larger quadratic electro-optic coefficient in TM polarization. In TM mode, the refractive index of SBN is increased by 1.3% as the temperature is increased to 160°C. Our results suggest that SBN waveguide is a potential candidate for thermo-optic modulators and switches. 191(1-4), 181-187 (2002). 20. R. Ulrich, and R. Torge, "Measurement of thin-film parameters with a prism coupler," Appl. Opt. 12(12), 2901-2908 (1973). 21. G. Burns, and F. H. Dacol, "Crystalline ferroelectrics with glassy polarization behavior," Phys. Rev. B 28(5), 2527-2530 (1983

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Advanced fiber optical switches using deep RIE (DRIE) fabrication

Cited by 95 publications

References 6 publications

Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light

Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light

Non-initial overlap bulk silicon comb-drive actuator with low-voltage and large-displacement

Thermo-optic properties of epitaxial Sr_06Ba_04Nb_2O_6 waveguides and their application as optical modulator

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