Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light

Sabry, Yasser M.; Saadany, Bassam; Khalil, Diaa; Bourouina, Tarik

doi:10.1038/lsa.2013.50

Cited by 51 publications

(29 citation statements)

References 39 publications

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“…Fiber to fiber coupling loss occurs due to the diffraction of the optical beam in the free space and the corresponding mode size/phase mismatch [16]. By considering the Gaussian beam approximation for the output beam from the SM fiber [28], the coupling efficiency is given by: where w o is the beam waist radius, k is the wavenumber, w is the beam radius at the input plane of the output fiber and ρ is the beam phase front radius of curvature; both are calculated after propagation of distance D between the input and output fibers and given by:…”

Section: ) Fiber To Fiber Coupling Lossmentioning

confidence: 99%

“…The typical etching depth for optical MEMS applications is in the order 70-80 μm, and most recently reported up to 300 μm [15]. In addition, the fabrication of three-dimensional curved micromirrors compatible with the technology was reported [16] overcoming the challenges of limited optical throughput and coupling efficiency [14]. In parallel, various optical MEMS components with in-plane optical axis were designed and fabricated, such as MEMS optical switches [17], optical scanners [18], tunable optical filters [19,20] and interferometers [21] leading to the realization of miniaturized optical systems; such as spectrometers [22] and swept laser source for biomedical imaging [23].…”

Section: Introductionmentioning

confidence: 99%

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In-Line Optical MEMS Phase Modulator and Application in Ring Laser Frequency Modulation

Khalil

Sabry

Hassan³

et al. 2016

IEEE J. Quantum Electron.

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Optical phase modulators are essential building components in a wide range of applications, for instance, optical communication systems, tunable lasers, optical phase locked loops and optical sensors. The production of in-plane MEMSbased optical phase modulator with self-aligned mirrors, actuator and fiber grooves enables the low cost and easy integration with fiber-based lasers and sensors or photonic microsystems. In this work, we report an in-plane transmission type MEMS-based optical phase modulator fabricated by deep reactive ion etching (DRIE) technology on a Silicon-On-Insulator (SOI) substrate. Detailed optical analysis of the MEMS phase modulator taking into account the diffraction of the single-mode fiber output beam, the asymmetric truncation of the beam by the limited aperture of the micromirrors and the tilt angle of the deeply-etched mirrors is presented. The device layer height of the fabricated SOI wafer is 100 µm and the sidewalls are etched with verticality that is better than 89.98°. The micromechanical system is characterized experimentally using electrical technique and the resonance frequency and quality factor are 11.3 kHz and 163, respectively. The MEMS device is integrated into fiber ring laser (FRL) enabling the achievement of low and high frequency modulation indices. The frequency modulation of the FRL using the presented phase modulator is supported with numerical analysis and experimental results.Index Terms-DRIE, fiber-coupled MEMS, in-plane optical axis, MEMS optical phase modulator, multi-longitudinal mode ring laser, silicon photonics.

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Section: ) Fiber To Fiber Coupling Lossmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

In-Line Optical MEMS Phase Modulator and Application in Ring Laser Frequency Modulation

Khalil

Sabry

Hassan³

et al. 2016

IEEE J. Quantum Electron.

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“…Also spherical mirror fabrication causes the wafer to be fragile due to long etching time. So our geometry depends on simplicity in fabrication as well as miniaturization [20]. THEORITICAL ANALYSIS…”

Section: Materials and Fabrication Methodsmentioning

confidence: 99%

“…Removing of sacrificial layers allows for mechanical movement of structures. Here the complete configuration can putted on chip that includes mirrors, actuator and fiber alignment structure as well as laser source assembled on chip and the fabrication of all components can made in a single DRIE etch process [20].…”

Section: Materials and Fabrication Methodsmentioning

confidence: 99%

A Dual Cylindrical Tunable Laser Based on MEMS

Fawzy¹,

Elghandour²,

Hamed³

2016

ijacsa

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Abstract-Free space optics is considered the topic of the day and have a large variety of applications which free space separates source from destination such as External cavity tunable laser (ECTL). In ECTL, laser source emits Gaussian beam that propagates in plane with substrate until reach external reflector. The efficiency of these applications depends on the amount of light that coupled back to the laser, called coupling efficiency. Increasing coupling efficiency depends on using assembled lens's or any optical part in the path between laser front facet and external reflector, which result in increasing the cost and integration effort. We innovate here anew configuration of external cavity tunable laser based on cylindrical (curved) Mirrors. The usage of cylindrical mirror affects on the amount of light that coupled back to laser and that decreases the alignment requirement in the laser assembly as compared to another configurations based on flat mirror. The fabrication of cylindrical mirror is simple with respect to spherical mirror so it can be used in batch fabrication. Tuning achieved by using micro electro mechanical system MEMS technology. The system consists of a laser cavity and a two filter cavities for wavelength selection. The formation of cylindrical microstructures were made into the substrate volume. So we report also the micromachining method that used for fabricating the cylindrical mirror. Anisotropic etching and the deep reactive ion etching (DRIE) are especially useful for the batch fabrication of large optical mechanical devices. The characteristics of the laser's spectral response versus laser facet reflectance variations are described via simulations. The diffraction of light in ECTL formed by the laser front facet and the external reflector are taken into account. Here we report all things about the model including the fabrication steps and simulation analysis.

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“…In this study, a CCD camera is used to measure the optical power emerging from the hole; the measured quantity is thus proportional to the integral of the intensity within the pinhole with radius a , and we have an experimental performance metric [18][19][20] …”

Section: Performance Metric Of Our Fso Systemmentioning

confidence: 99%

Model-Based Tabu Search Algorithm for Free-Space Optical Communication with a Novel Parallel Wavefront Correction System

Zhao

Cao

et al. 2015

Journal of the Optical Society of Korea

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In this study, a novel parallel wavefront correction system architecture is proposed, and a model-based tabu search (MBTS) algorithm is introduced for this new system to compensate wavefront aberration caused by atmospheric turbulence in a free-space optical (FSO) communication system. The algorithm flowchart is presented, and a simple hypothetical design for the parallel correction system with multiple adaptive optical (AO) subsystems is given. The simulated performance of MBTS for an AO-FSO system is analyzed. The results indicate that the proposed algorithm offers better performance in wavefront aberration compensation, coupling efficiency, and convergence speed than a stochastic parallel gradient descent (SPGD) algorithm.

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Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light

Cited by 51 publications

References 39 publications

In-Line Optical MEMS Phase Modulator and Application in Ring Laser Frequency Modulation

In-Line Optical MEMS Phase Modulator and Application in Ring Laser Frequency Modulation

A Dual Cylindrical Tunable Laser Based on MEMS

Model-Based Tabu Search Algorithm for Free-Space Optical Communication with a Novel Parallel Wavefront Correction System

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