2014
DOI: 10.1541/ieejsmas.134.58
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Active Touch Sensing by Multi-axial Force Measurement Using High-Resolution Tactile Sensor with Microcantilevers

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Cited by 16 publications
(5 citation statements)
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“…Wrist-worn multimodal sensors comprising accelerometers, magnetometers, and gyroscopes improved the accuracy of data compared with the individual use of unimodal sensors [ 9 ]. Recently, to reduce the bulky size, a miniature multi-axial tactile sensor was fabricated by micro-electro-mechanical-system technology, which detects shear force using NiCr strain gauge film embedded in elastomer [ 47 ]. Developing multimodal sensors which can be incorporated easily into rehabilitation devices using nanotechnology would enhance the reliability of data and broaden the clinical applicability.…”
Section: Discussionmentioning
confidence: 99%
“…Wrist-worn multimodal sensors comprising accelerometers, magnetometers, and gyroscopes improved the accuracy of data compared with the individual use of unimodal sensors [ 9 ]. Recently, to reduce the bulky size, a miniature multi-axial tactile sensor was fabricated by micro-electro-mechanical-system technology, which detects shear force using NiCr strain gauge film embedded in elastomer [ 47 ]. Developing multimodal sensors which can be incorporated easily into rehabilitation devices using nanotechnology would enhance the reliability of data and broaden the clinical applicability.…”
Section: Discussionmentioning
confidence: 99%
“…When a cantilever deforms so that deflection decreases, resistance of the strain gauge increases. Therefore, magnitude and direction of external force can be estimated if response characteristics of each cantilever for normal and shear loads have been measured beforehand 7 …”
Section: Sensor Structure and Detection Principlementioning
confidence: 99%
“…In addition, by reducing the area occupied by the cantilever, it has also become possible to locate an interdigitated array electrode in the newly fabricated sensor. In the newly fabricated cantilever, the length and width are different from the previous one, thus the height of tip of warped cantilever is also different [20]. The sensitivities of the sensor to normal load and shear load depends on tip height of the cantilever.…”
Section: Design and Fabrication Of Tactile Sensormentioning
confidence: 99%