Tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for physical and chemical resistance

Abstract

This paper addresses physical and chemical resistance evaluation of tactile sensors. We have developed cantilevertype MEMS tactile sensors embedded in the elastomer. In this work, we used a combination of silicone elastomer with excellent mechanical properties and fluoroelastomer with excellent chemical resistance. As a new embedding method for the sensor, we devised a method of embedding with PDMS with low creep and coating with a fluoroelastomer for surface protection. We further performed three evaluations to demonstrate the physical and chemical resistance of sensors. Consequently, using the devised method, we have demonstrated that the sensor with both physical and chemical resistance are feasible.

Encapsulating and inkjet-printing flexible conductive patterns on a fluoroelastomer for harsh hydrocarbon fluid environments

“…25 Takahashi et al fabricated a tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for protection against external physical and chemical repercussions. 26 Owing to its chemical inertness, researchers have used FKM with several conductive materials; metals like silver (Ag), copper (Cu), gold (Au), and aluminum (Al); 2D materials i.e. graphite (G), graphene(GO); polymers such as poly (3,4-ethylenedioxythiophene) PEDOT; and carbon nanotubes (CNT) in a wide area of applications without reporting any degradation in performance.…”