A transversely rf-excited CO2 waveguide laser

Lachambre, J. L.; Macfarlane, J.C.; Otis, G.; Lavigne, Pierre

doi:10.1063/1.89883

Cited by 45 publications

(9 citation statements)

References 10 publications

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“…An RF-CO 2 laser emits high average power output at high repetition rate (e.g., 465 W at 125 MHz in Ref. [1]) [1][2][3]. In processing, however, the thermal influence on the target is large because the laser pulse width is long (e.g., 20 μs in Ref.…”

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confidence: 99%

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Longitudinally Excited CO2 Laser with Short Laser Pulse like TEA CO2 Laser

Uno

Nakamura

Goto³

et al. 2009

J Infrared Milli Terahz Waves

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We have developed a longitudinally excited CO 2 laser with a short laser pulse similar to that of TEA and Q-switched CO 2 lasers. A capacitor transfer circuit with a low shunt resistance provided rapid discharge and a sharp spike pulse with a short pulse tail. Specifically, a circuit with a resistance of 10 M Ω provided a spike pulse width of 103.3 ns and a pulse tail length of 61.9 μs, whereas a circuit with a shunt resistance of 100 Ω provided a laser pulse with a spike pulse width of 96.3 ns and a pulse tail length of 17.2 μs. The laser pulses from this longitudinally excited CO 2 laser were used for processing a human tooth without carbonization and for glass marking without cracks.

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confidence: 99%

“…In processing, however, the thermal influence on the target is large because the laser pulse width is long (e.g., 20 μs in Ref. [3]). A TEA-CO 2 laser, on the other hand, emits laser pulses with high output energy and a short pulse width (typically, a spike pulse with a pulse width of about 100 ns and a pulse tail of several microseconds) [4][5][6][7][8].…”

mentioning

confidence: 99%

Longitudinally Excited CO2 Laser with Short Laser Pulse like TEA CO2 Laser

Uno

Nakamura

Goto³

et al. 2009

J Infrared Milli Terahz Waves

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“…CO 2 lasers with a wide variety of excitation schemes have been developed, such as DC discharge [2][3][4], RF discharge [5,6], transverse discharge [7][8][9][10], and longitudinal discharge [11][12][13][14][15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Simple Short-Pulse CO2 Laser Excited by Longitudinal Discharge without High-Voltage Switch

Uno

Jitsuno

Akitsu

2012

J Infrared Milli Terahz Waves

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We have developed a longitudinally excited CO 2 laser without a high-voltage switch. The laser produces a short laser pulse similar to those from TEA and Q-switched CO 2 lasers. This system, which is the simplest short-pulse CO 2 laser yet constructed, includes a pulsed power supply, a high-speed step-up transformer, a storage capacitor, and a laser tube. At high pressure (4.2 kPa and above), a rapid discharge produces a short laser pulse with a sharp spike pulse. In mixed gas (CO 2 : N 2 : He01: 1: 2) at a pressure of 9.0 kPa, the laser pulse contains a spike pulse of 218 ns and has a pulse tail length of 16.7 μs.

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“…A period between early seventies and nineties of last century was witness to the research efforts on new aspects of the sealed−off, diffusion cooled waveguide CO 2 lasers [52][53][54]. The successful combination of waveguiding and the RF−discharge [55] have led to a culmination in a form of power−scalable, planar waveguide CO 2 lasers [56][57][58], marking a new era of the compact CO 2 laser tech− nology. These practically maintenance−free lasers operate usually with gas mix pressure 50-150 Torr and are capable of operating in a wide range of pulsing frequencies, from single−pulse mode to CW−mode of RF−discharge, producing pulses of 50-500 microseconds in optical beams of good quality delivered by various configurations of unstable−wa− veguide hybrid resonators [57].…”

Section: Brief Overview Of Relevant Co 2 Laser Technologymentioning

confidence: 99%

“…1 Ref. 55. EUV wave− length range is also attractive for other applications, such as high−resolution non−destructive microscopy [6][7][8][9][10][11] or mate− rial processing [12][13][14][15][16][17][18][19] to name a few.…”

Section: Introductionmentioning

confidence: 99%

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

Nowak

Ohta

Suganuma

et al. 2013

Opto-Electronics Review

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It was shown both theoretically and experimentally that nanosecond order laser pulses at 10.6 micron wavelength were superior for driving the Sn plasma extreme ultraviolet (EUV) source for nano-lithography for the reasons of higher conversion efficiency, lower production of debris and higher average power levels obtainable in CO2 media without serious problems of beam distortions and nonlinear effects occurring in competing solid-state lasers at high intensities. The renewed interest in such pulse format, wavelength, repetition rates in excess of 50 kHz and average power levels in excess of 18 kiloWatt has sparked new opportunities for a matured multi-kiloWatt CO2 laser technology. The power demand of EUV source could be only satisfied by a Master-Oscillator-Power-Amplifier system configuration, leading to a development of a new type of hybrid pulsed CO2 laser employing a whole spectrum of CO2 technology, such as fast flow systems and diffusion-cooled planar waveguide lasers, and relatively recent quantum cascade lasers. In this paper we review briefly the history of relevant pulsed CO2 laser technology and the requirements for multi-kiloWatt CO2 laser, intended for the laser-produced plasma EUV source, and present our recent advances, such as novel solid-state seeded master oscillator and efficient multi-pass amplifiers built on planar waveguide CO2 lasers.

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A transversely rf-excited CO2 waveguide laser

Cited by 45 publications

References 10 publications

Longitudinally Excited CO2 Laser with Short Laser Pulse like TEA CO2 Laser

Longitudinally Excited CO2 Laser with Short Laser Pulse like TEA CO2 Laser

Simple Short-Pulse CO2 Laser Excited by Longitudinal Discharge without High-Voltage Switch

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

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