1996
DOI: 10.1016/0026-2714(96)00022-4
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A review of hot-carrier degradation mechanisms in MOSFETs

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Cited by 99 publications
(67 citation statements)
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“…They become highly energized and should be accelerated away from their normal directional flow. These highly energized electrons may create interface states by breaking silicon bonds [19] or be injected into generated surface traps (hot electron injection) at interface between gate oxide and N À LDD overlap area beneath SiO 2 layer. The trapped electrons reduce the electric charge density and therefore the total charge in the area affected by the trapped carriers.…”
Section: Evolution Of C Iss C Oss and C Rss After Ageingmentioning
confidence: 99%
“…They become highly energized and should be accelerated away from their normal directional flow. These highly energized electrons may create interface states by breaking silicon bonds [19] or be injected into generated surface traps (hot electron injection) at interface between gate oxide and N À LDD overlap area beneath SiO 2 layer. The trapped electrons reduce the electric charge density and therefore the total charge in the area affected by the trapped carriers.…”
Section: Evolution Of C Iss C Oss and C Rss After Ageingmentioning
confidence: 99%
“…This is due to the bombardment by carriers which have gained sufficiently high energy and are thus called ''hot" carriers (see [1] and references therein). These interface states, characterized by a density N it , are able to capture charge carriers and, hence, become charged.…”
Section: Introductionmentioning
confidence: 99%
“…5. Basically, the doping dosage at the S/D extension zone (P SDE ) is less than the S/D implant (P + ) around one tenth, compared with the lightly-doped drain implant (P − ) before 110 nm node process (normally, P + /P − > 10) to reduce the hot-carrier effect (HCE) [19][20][21][22]. Owing to this effort, the series resistance in channel is decreased and the ON current is possibly increased.…”
Section: Resultsmentioning
confidence: 99%