Atomically thin semiconductors such
as transition metal dichalcogenides
have recently enabled diverse devices in the emerging two-dimensional
(2D) electronics. While scalable 2D electronics demand monolithic
integrated circuits consisting of complementary p-type and n-type
transistors, conventional p-type and n-type doping in desired regions,
monolithically in the same semiconducting atomic layers, remains elusive
or impractical. Here, we report on an agile, high-precision scanning
laser annealing approach to realizing 2D monolithic complementary
logic circuits on atomically thin MoTe2, by reliably designating
p-type and n-type transport polarity in the constituent transistors via localized laser annealing and modification of their
Schottky contacts. Pristine p-type field-effect transistors (FETs)
transform into n-type ones upon controlled laser annealing on their
source/drain gold electrodes, exhibiting a mobility of 96.5 cm2 V–1 s–1 (the highest
known to date) and an On/Off ratio of 106. Elucidation
and validation of such an on-demand configuration of polarity in MoTe2 FETs further enable the construction and demonstration of
essential logic circuits, including both inverter and NOR gates. This
dopant-free, spatially precise scanning laser annealing approach to
configuring monolithic complementary logic integrated circuits may
enable programmable functions in 2D semiconductors, exhibiting potential
for additively manufactured, scalable 2D electronics.