A Phase-Domain Readout Circuit for a CMOS-Compatible Hot-Wire CO<sub>2</sub>Sensor

Cai, Zeyu; Veldhoven, Robert van; Suy, Hilco; Graaf, G. de; Makinwa, Kofi A. A.; Pertijs, Michiel A. P.

doi:10.1109/jssc.2018.2866374

Cited by 9 publications

(6 citation statements)

References 32 publications

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“…In the case of CO 2 , the studies of Cai et al [24], and Kliche et al [10], which are both based on time-domain readout circuits, achieve a resolution limit of 94 ppm, and 2000 ppm, respectively. The work of Kommandur et al [32] is also based on the 3ω-method and obtains a resolution limit of 4970 ppm, which is comparable to the resolution limit of our study.…”

Section: Sensitivitymentioning

confidence: 99%

“…It appears that particularly dynamic or pulsed methods seem to be advantageous for the detection of CO 2 . This observation is based on the fact that Cai et al [24] and Kliche et al [10] were able to resolve very low concentrations using dynamic methods, whereas the resolution limit for 3ω-based studies [32,33] was significantly higher. In the case of H 2 , a (quasi)-static operation, such as low-frequency 3ω-method or steady-state operation, might be better.…”

Section: Sensitivitymentioning

confidence: 99%

“…The current can, for example, be applied in pulses. The evaluation quantity is then the height, the time constant, or the phase shift of the subsequent resistance pulse [10,21,[24][25][26][27]. Besides the pulsed method, a constant-temperature operation can be established using a suitable control circuit.…”

Section: Introductionmentioning

confidence: 99%

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A Robust Miniaturized Gas Sensor for H2 and CO2 Detection Based on the 3ω Method

Berndt

Muggli

Heckel

et al. 2022

Sensors

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Gas concentration monitoring is essential in industrial or life science areas in order to address safety-relevant or process-related questions. Many of the sensors used in this context are based on the principle of thermal conductivity. The 3ω-method is a very accurate method to determine the thermal properties of materials. It has its origin in the thermal characterization of thin solid films. To date, there have been very few scientific investigations using this method to determine the thermal properties of gases and to apply it to gas measurement technology. In this article, we use two exemplary gases (H2 and CO2) for a systematical investigation of this method in the context of gas analysis. To perform our experiments, we use a robust, reliable sensing element that is already well established in vacuum measurement technology. This helix-shaped thin wire of tungsten exhibits high robustness against chemical and mechanical influences. Our setup features a compact measurement environment, where sensor operation and data acquisition are integrated into a single device. The experimental results show a good agreement with a simplified analytical model and FEM simulations. The sensor exhibits a lower detection limit of 0.62% in the case of CO2, and only 0.062% in case the of H2 at an excitation frequency of 1Hz. This is one of the lowest values reported in literature for thermal conductivity H2 sensors.

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Section: Sensitivitymentioning

confidence: 99%

Section: Sensitivitymentioning

confidence: 99%

See 1 more Smart Citation

A Robust Miniaturized Gas Sensor for H2 and CO2 Detection Based on the 3ω Method

Berndt

Muggli

Heckel

et al. 2022

Sensors

View full text Add to dashboard Cite

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“…Examples of assessing precision of the low-cost particle sensors based on the light scattering in a glass chamber can be found in [65,127]. The remaining publications in the group 3 did not clearly state their case study as they dedicated their study to describe the development of the low-cost CO 2 sensing system based on the nanofibers [128], wireless sensor [129] and hot-wire CO 2 sensor in CMOS technology [130].…”

Section: Thermal Comfort and Hvac (Category 3)mentioning

confidence: 99%

Application of Low-Cost Sensors for Building Monitoring: A Systematic Literature Review

et al. 2021

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In recent years, many scholars have dedicated their research to the development of low-cost sensors for monitoring of various parameters. Despite their high number of applications, the state of the art related to low-cost sensors in building monitoring has not been addressed. To fill this gap, this article presents a systematic review, following well-established methodology, to analyze the state of the art in two aspects of structural and indoor parameters of buildings, in the SCOPUS database. This analysis allows to illustrate the potential uses of low-cost sensors in the building sector and addresses the scholars the preferred communication protocols and the most common microcontrollers for installation of low-cost monitoring systems. In addition, special attention is paid to describe different areas of the two mentioned fields of building monitoring and the most crucial parameters to be monitored in buildings. Finally, the deficiencies in line with limited number of studies carried out in various fields of building monitoring are overviewed and a series of parameters that ought to be studied in the future are proposed.

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“…The use of the tungsten VIA3 has been demonstrated previously for MEMS devices: resonators for monolithically CMOS-MEMS stand-alone oscillators [ 18 , 19 ], relays for switching applications [ 13 , 14 , 15 ], and very recently as CO 2 transducers [ 20 ]. All these applications demonstrate the importance of the approach and the opportunity to explore new MEMS structures and devices based on this tungsten VIA3 approach.…”

Section: Introductionmentioning

confidence: 99%

High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer

et al. 2018

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In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 μm complementary metal oxide semiconductor (CMOS) technology is presented. The seesaw relay is fabricated using the Back-End-Of-Line (BEOL) layers available, specifically using the tungsten VIA3 layer of a 0.35 μm CMOS technology. Three different contact materials are studied to discriminate which is the most adequate as a mechanical relay. The robustness of the relay is proved, and its main characteristics as a relay for the three different contact interfaces are provided. The seesaw relay is capable of a double hysteretic switching cycle, providing compactness for mechanical logic processing. The low contact resistance achieved with the TiN/W mechanical contact with high cycling life time is competitive in comparison with the state-of-the art.

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A Phase-Domain Readout Circuit for a CMOS-Compatible Hot-Wire CO₂Sensor

Cited by 9 publications

References 32 publications

A Robust Miniaturized Gas Sensor for H2 and CO2 Detection Based on the 3ω Method

A Robust Miniaturized Gas Sensor for H2 and CO2 Detection Based on the 3ω Method

Application of Low-Cost Sensors for Building Monitoring: A Systematic Literature Review

High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer

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A Phase-Domain Readout Circuit for a CMOS-Compatible Hot-Wire CO2Sensor

Cited by 9 publications

References 32 publications

A Robust Miniaturized Gas Sensor for H2 and CO2 Detection Based on the 3ω Method

A Robust Miniaturized Gas Sensor for H2 and CO2 Detection Based on the 3ω Method

Application of Low-Cost Sensors for Building Monitoring: A Systematic Literature Review

High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer

Contact Info

Product

Resources

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A Phase-Domain Readout Circuit for a CMOS-Compatible Hot-Wire CO₂Sensor