Gas concentration monitoring is essential in industrial or life science areas in order to address safety-relevant or process-related questions. Many of the sensors used in this context are based on the principle of thermal conductivity. The 3ω-method is a very accurate method to determine the thermal properties of materials. It has its origin in the thermal characterization of thin solid films. To date, there have been very few scientific investigations using this method to determine the thermal properties of gases and to apply it to gas measurement technology. In this article, we use two exemplary gases (H2 and CO2) for a systematical investigation of this method in the context of gas analysis. To perform our experiments, we use a robust, reliable sensing element that is already well established in vacuum measurement technology. This helix-shaped thin wire of tungsten exhibits high robustness against chemical and mechanical influences. Our setup features a compact measurement environment, where sensor operation and data acquisition are integrated into a single device. The experimental results show a good agreement with a simplified analytical model and FEM simulations. The sensor exhibits a lower detection limit of 0.62% in the case of CO2, and only 0.062% in case the of H2 at an excitation frequency of 1Hz. This is one of the lowest values reported in literature for thermal conductivity H2 sensors.
The article describes a new method for obtaining fuel properties, derived from the thermal properties of natural gas fuel mixtures. By measuring the thermal conductivity and the dynamic response with the help of a heated Micro Electro Mechanical System (MEMS), input values for a mathematical correlation are obtained which predict the calorific value of the gas. In this paper the fundamentals of the theoretical gas properties, the sensor operation and the first results on a gas test bench are presented.
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