A nanoelectromechanical tunable laser

Huang, M.C.Y.; Zhou, Ye; Chang-Hasnain, Connie J.

doi:10.1038/nphoton.2008.3

Cited by 203 publications

(122 citation statements)

References 28 publications

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“…SWG reflectors integrated in Fabry-Perot resonators have also been used to realize vertical-cavity surface-emitting lasers (VCSELs) 19 by replacing the conventional DBRs, and also to show novel MEMS devices. 9,20 This asymmetric Fabry-Perot resonator is equivalent to a conventional Gires-Tournois interferometer, with a bottom mirror exhibiting nearly unity reflectivity and a less reflective top mirror, that is widely used for pulse compression bacause of its highly dispersive phase response. Owing to the high electric field energy density in the silicon SWG layer when used in a Fabry-Perot resonator 21 ( Figure 1d), the resonance frequency can be efficiently tuned with respect to the wavelength of the incident light by modulating the refractive index of the silicon bars.…”

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confidence: 99%

High-Speed, Phase-Dominant Spatial Light Modulation with Silicon-Based Active Resonant Antennas

Horie

Arbabi

et al. 2017

ACS Photonics

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Spatiotemporal control of optical wavefronts is of great importance in numerous free-space optical applications including imaging in 3D and through scattering media, remote sensing, and generation of various beam profiles for microscopy. Progress in these applications is currently limited due to lack of compact and high-speed spatial light modulators. Here we report an active antenna comprising a free-space coupled asymmetric Fabry–Perot resonator that produces a phase-dominant thermo-optic modulation of reflected light at frequencies approaching tens of kilohertz. As a proof of concept for spatial light modulation, we demonstrate a 6 × 6 array of such active antennas with beam deflection capability. The robust design of our silicon-based active antenna will enable large-scale integration of high-speed, phase-dominant spatial light modulators.

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mentioning

confidence: 99%

High-Speed, Phase-Dominant Spatial Light Modulation with Silicon-Based Active Resonant Antennas

Horie

Arbabi

et al. 2017

ACS Photonics

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“…In optical communications, MEMS concept was introduced into various products to make them smaller, cheaper and better. Optical switches [116][117][118][119], optical attenuators [120], optical data modulators, filters, spectrometers [121] and tunable lasers [122] are some examples of optical MEMS devices. These devices have facilitated the rapid progress of the telecommunication industry.…”

Section: Optics and Photonicsmentioning

confidence: 99%

Review on Micro- and Nanolithography Techniques and their Applications

2012

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Abstract. This article reviews major micro-and nanolithography techniques and their applications from commercial micro devices to emerging applications in nanoscale science and engineering. Micro-and nanolithography has been the key technology in manufacturing of integrated circuits and microchips in the semiconductor industry. Such a technology is also sparking revolutionizing advancements in nanotechnology. The lithography techniques including photolithography, electron beam lithography, focused ion beam lithography, soft lithography, nanoimprint lithography and scanning probe lithography are discussed. Furthermore, their applications are summarized into four major areas: electronics and microsystems, medical and biotech, optics and photonics, and environment and energy harvesting.

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“…Thereafter, the extraordinary and intriguing properties of HCGs have been exploited to design and build various optical elements such as high-Q Fabry-Perot resonators [4], top mirrors in vertical-cavity surface-emitting lasers [5,6], one-and two-dimensional hollow-core low-loss optical waveguides [7], slow-light waveguides [8], planar focusing reflectors and lenses [9,10] In a recent study, we have shown that a two-dimensional HCG structure with optimized geometrical parameters can be utilized for implementing a broadband circular polarizer [18]. The optimized geometrical parameters have been suggested by benefiting from the periodic dielectric slab waveguide interpretation, which is studied rigorously in [19].…”

Section: Introductionmentioning

confidence: 99%

Experimental realization of a high-contrast grating based broadband quarter-wave plate

Mutlu¹,

Akosman²,

Kurt³

et al. 2012

Opt. Express

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Fabrication and experimental characterization of a broadband quarter-wave plate, which is based on two-dimensional and binary silicon high-contrast gratings, are reported. The quarter-wave plate feature is achieved by the utilization of a regime, in which the proposed grating structure exhibits nearly total and approximately equal transmission of transverse electric and transverse magnetic waves with a phase difference of approximately π/2. The numerical and experimental results suggest a percent bandwidth of 42% and 33%, respectively, if the operation regime is defined as the range for which the conversion efficiency is higher than 0.9. A compact circular polarizer can be implemented by combining the grating with a linear polarizer.

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A nanoelectromechanical tunable laser

Cited by 203 publications

References 28 publications

High-Speed, Phase-Dominant Spatial Light Modulation with Silicon-Based Active Resonant Antennas

High-Speed, Phase-Dominant Spatial Light Modulation with Silicon-Based Active Resonant Antennas

Review on Micro- and Nanolithography Techniques and their Applications

Experimental realization of a high-contrast grating based broadband quarter-wave plate

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