2006
DOI: 10.1016/j.sna.2006.06.006
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A multilayer thick-film PZT actuator for MEMs applications

Abstract: This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use … Show more

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Cited by 53 publications
(34 citation statements)
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“…However, both of these are relatively expensive materials so they point towards the possibility to use a separate sterile microfluidic component, such as a capillary, to reduce the cost of disposal and replacement for each biological sample [30]. It is also possible to integrate piezoelectric materials in thick [53] or thin film [54,55] form, or indeed bonded bulk material [56], with other components. Requiring an additional level of fabrication sophistication, typically including photolithography [57], this approach may be very useful when the number of devices is high and may be a key issue in differentiating acoustic manipulation from optical manipulation [58], where integration is still much harder.…”
Section: Limitations and Typical Parameters For On-chip Manipulationmentioning
confidence: 99%
“…However, both of these are relatively expensive materials so they point towards the possibility to use a separate sterile microfluidic component, such as a capillary, to reduce the cost of disposal and replacement for each biological sample [30]. It is also possible to integrate piezoelectric materials in thick [53] or thin film [54,55] form, or indeed bonded bulk material [56], with other components. Requiring an additional level of fabrication sophistication, typically including photolithography [57], this approach may be very useful when the number of devices is high and may be a key issue in differentiating acoustic manipulation from optical manipulation [58], where integration is still much harder.…”
Section: Limitations and Typical Parameters For On-chip Manipulationmentioning
confidence: 99%
“…Although much research has been conducted on printed electronics, there has been relatively little work on printed mechanical actuators [18][19][20][21][22][23][24][25][26] . EAPs are a promising class of materials for such printed components because they can be solution processed [27][28][29] .…”
Section: Introductionmentioning
confidence: 99%
“…Piezoelectric energy harvesting systems are now considered to be a suitable independent power source for lowpower sensors for micro scale [1][2][3][4][5][6][7][8] and nano scale [9,10].…”
Section: Introductionmentioning
confidence: 99%