2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104)
DOI: 10.1109/vlsit.2000.852749
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A modular 0.13 μm bulk CMOS technology for high performance and low power applications

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Cited by 16 publications
(8 citation statements)
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“…Thus, as the lithography pushes forward, the device designer and the product designer must devise new strategies to cope with the interference of passive power, which pushes for higher V T (and thus higher V DD ) versus active power, which demands lower V DD and thus lower V T . This results in fragmentation of device design points that address these conflicting needs in the foundry-CMOS business [5,6], where multiple values of T OX , V T , L GATE , and V DD are offered within a lithography generation (see Table 1). This approach allows the product designer flexibility to choose the best device match for active and passive power vs. performance.…”
Section: The Gordian Knot Of Cmos Scalingmentioning
confidence: 99%
“…Thus, as the lithography pushes forward, the device designer and the product designer must devise new strategies to cope with the interference of passive power, which pushes for higher V T (and thus higher V DD ) versus active power, which demands lower V DD and thus lower V T . This results in fragmentation of device design points that address these conflicting needs in the foundry-CMOS business [5,6], where multiple values of T OX , V T , L GATE , and V DD are offered within a lithography generation (see Table 1). This approach allows the product designer flexibility to choose the best device match for active and passive power vs. performance.…”
Section: The Gordian Knot Of Cmos Scalingmentioning
confidence: 99%
“…Such a thin gate-oxide of only ~2nm in a 130nm CMOS technology has been reported to result in a substantial fraction of the overall leakage current in the chip due to its gate leakage current [7]. To reduce the gate leakage current, the high-k metal gate technology is applied in 45-nm generation and beyond [8], [9].…”
Section: * This Work Was Supported By Ministry Of Economic Affairs Tmentioning
confidence: 99%
“…To ensure the best possible performance in bulk silicon technology at competitive cost, the Blue Gene/L chip was designed and fabricated in the IBM standard 0.13-lm bulk CMOS offering [21]. The basic device characteristics The technology specifications for off current are approximately 0.3 nA/lm for both devices, with maximum off currents of 2 nA/lm and 1 nA/lm for n-FET and p-FET at a 6r short gate length of 70 nm.…”
Section: Device Considerationsmentioning
confidence: 99%