A “micro-macro” integrated planar MEMS tactile sensor for precise modeling and measurement of fingertip sensation

Watatani, Kazuki; Kozai, Ryogo; Terao, Kyohei; Shimokawa, Fusao; Takao, Hidekuni

doi:10.1109/memsys.2017.7863381

Cited by 14 publications

(4 citation statements)

References 5 publications

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“…In the friction spectrum, peak 3, which corresponds to the pitch of the stitch, is significantly smaller than peak 4, which corresponds to the pitch of the treads. This result, which is similar to that in our previous report, 29) is a characteristic of the tactile information in fraise stitch and plain stitch. The touch sensation of fabrics is significantly affected by weave and thread thickness.…”

Section: • ( )supporting

confidence: 93%

“…The fabrication results of the tactile sensor and its surface texture detection ability have already been reported in a conference proceeding. 29) By contrast, in this paper, comparison of the measured waveforms in fabric samples with different weaving structures, and the contact pressure dependency of the micro-area tactile information in the soft fabric material are presented and discussed for the first time.…”

Section: Introductionmentioning

confidence: 96%

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Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

Watatani

Terao

Shimokawa

et al. 2019

Jpn. J. Appl. Phys.

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In this study, a tactile sensor integrating micro-and macro-scale tactile detection components was developed to reproduce the micro/macro touch sensations of the human fingertip. The micro-scale tactile detection component comprises a 500 μm diameter contactor that mimics the shape and size of the fingerprint ridge, and detects the micro shape of surfaces and local friction with high spatial resolution. The macro-scale tactile detection component detects the overall contact force and slipperiness via a wide-area sensor that mimics the skin of the fingertip. Three fabric samples with different weave structures were analyzed using the fabricated device. The fine surface pattern of the fabrics and slip friction were detected, and the differences according to the weave structure clearly extracted. Additionally, the contact force dependency of the tactile information, which is an important factor with regard to the touch sensation of a fabric, was successfully obtained using the two detection components.

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Section: • ( )supporting

confidence: 93%

Section: Introductionmentioning

confidence: 96%

Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

Watatani

Terao

Shimokawa

et al. 2019

Jpn. J. Appl. Phys.

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“…To obtain fine sensation like human fingertip, it is required to aim a sensor reproducing functions of fingertip skin sensation. High resolution two-axis MEMS tactile sensors with 100µm-spatial resolution and 50µN-sensitivity have been reported by our group (6,7) . Although their sensitivity and spatial resolution are comparable to fingertip skin, they have only single contactor, and "multiple point detection" like fingertip skin surface has not been realized.…”

Section: Silicon Mems Nano-tactile Sensor Based On Post-cmos Compatib...mentioning

confidence: 98%

(Invited) Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials

Takao

2020

ECS Trans.

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Based on silicon post-CMOS compatible process, we have realized high performance silicon MEMS tactile sensor called “Nano-tactile sensor”, which is comparable to the performance of fingertip sense of touch. In this tactile sensor device, all the mechanical structures are made from single crystalline silicon which is the active layer of SOI wafers. No elastomer/polymer structures are used in the mechanical sensing structure, and softness and elasticity necessary to tactile sensing are realized by silicon micro mechanical structures. In the latest version of our tactile sensors, six contactors with fingerprint-like shape are integrated at a pitch of 500µm to get high spatial resolution tactile images. Each fingerprint-like contactor reproduces vertical motion (by micro roughness) and horizontal motion (by frictional force) of a fingerprint closely under sweeping motion of fingertip in measurement. The performances are enough high to analyze surface touch feelings of “Hair surface condition”, “Skin condition”, and “Touch feeling of various papers and clothes” like human fingertip. Combination of high-resolution tactile sensor and deep neural network is a strong approach to reproduce human fingertip sensation by state-of-the-art device electron device technology.

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“…Human fingertips are able to sense tiny oscillations of the submicron order, and tactile sensors approaching fingerprint resolution were developed . These sensors provided with contacts imitating fingerprint motion are used to evaluate tactile sensation of human glabrous (hair‐free) skin. On the other hand, hairy skin contains peculiar mechanoreceptors called hair follicles; these are assumed to underlie perception specific to hairy skin, including wind, static electricity, and fluid level.…”

Section: Introductionmentioning

confidence: 99%

A highly sensitive MEMS silicon‐hair device reproducing the function of hair follicle

Hamamoto

Terao

Shimokawa

et al. 2019

Elect Comm in Japan

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This paper reports a highly sensitive MEMS silicon‐hair device with novel functions of hair follicle. Human hairy skin has peculiar receptor called hair follicle. Therefore, a highly sensitive sensor reproducing the function of hair follicle is demanded in order to quantify peculiar sense in hairy skin such as wind, static electricity, and perception of the liquid surface. The developed device in this study has fine silicon‐hair with 10 µm width and 5 mm length. Moreover, it detects two‐axis force and one‐axis moment applied to silicon‐hair by piezoresistors. The MEMS silicon‐hair device has realized resolutions of 5 µN axial force, 1 µN shear force, and 3nN·m moment. Also, the device in this study precisely acquired surface tension close to the physical property of water and ethanol water solution. In addition, the MEMS silicon‐hair device was successful in detecting 0.1 µN electrostatic attraction. Resolutions of shear force and moment have been improved by 10‐fold using the resonance‐drive of silicon‐hair.

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A “micro-macro” integrated planar MEMS tactile sensor for precise modeling and measurement of fingertip sensation

Cited by 14 publications

References 5 publications

Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

(Invited) Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials

A highly sensitive MEMS silicon‐hair device reproducing the function of hair follicle

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