Abstract:Based on silicon post-CMOS compatible process, we have realized high performance silicon MEMS tactile sensor called “Nano-tactile sensor”, which is comparable to the performance of fingertip sense of touch. In this tactile sensor device, all the mechanical structures are made from single crystalline silicon which is the active layer of SOI wafers. No elastomer/polymer structures are used in the mechanical sensing structure, and softness and elasticity necessary to tactile sensing are realized by silicon micro … Show more
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