Abstract:This paper reports a highly sensitive MEMS silicon‐hair device with novel functions of hair follicle. Human hairy skin has peculiar receptor called hair follicle. Therefore, a highly sensitive sensor reproducing the function of hair follicle is demanded in order to quantify peculiar sense in hairy skin such as wind, static electricity, and perception of the liquid surface. The developed device in this study has fine silicon‐hair with 10 µm width and 5 mm length. Moreover, it detects two‐axis force and one‐axis… Show more
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