Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

Abstract

In this study, a tactile sensor integrating micro-and macro-scale tactile detection components was developed to reproduce the micro/macro touch sensations of the human fingertip. The micro-scale tactile detection component comprises a 500 μm diameter contactor that mimics the shape and size of the fingerprint ridge, and detects the micro shape of surfaces and local friction with high spatial resolution. The macro-scale tactile detection component detects the overall contact force and slipperiness via a wide-area sensor that mimics the skin of the fingertip. Three fabric samples with different weave structures were analyzed using the fabricated device. The fine surface pattern of the fabrics and slip friction were detected, and the differences according to the weave structure clearly extracted. Additionally, the contact force dependency of the tactile information, which is an important factor with regard to the touch sensation of a fabric, was successfully obtained using the two detection components.

Neural-Network-Based Tactile Perception System Using Ultrahigh-Resolution Tactile Sensor

“…Fig. 2 shows photographs and the working principle of the tactile sensor that we developed [12]. The sensor substrate is a p-type silicon on insulator with a 50-µm-thick device layer.…”

“…Since the core of the neural network is feature extraction and both regression and classification models are realized with almost identical architectures, the above methods are considered effective approaches for tactile perception as regression problems too. Under these circumstances, our group has developed a tactile sensor that mimics a single fingerprint on a human fingertip [12], [13]. The tactile sensor can measure surface shape and frictional force at the same point at the same time from contacting object and has an ultrahigh resolution for force, displacement, and horizontal spatial, which are more than that of a human fingertip [14], [15].…”

Pen‐type pulse wave measurement system for detecting pathological changes in cardiac diseases

“…In this context, we developed a high‐resolution MEMS tactile sensor 4 (Figure 1) with displacement resolution of 0.4 μm and input resolution of 50 μN, and built a measurement system to acquire precise cardiovascular information. In conventional measurement schemes, a precision stage was needed to maintain positional relationship between a sensor and an object, which imposed strict limitations on object and place of measurement.…”

“…High‐resolution MEMS tactile sensor 4 used in pen‐type pulse wave measurement system [Colour figure can be viewed at wileyonlinelibrary.com]…”