1996
DOI: 10.1088/0957-0233/7/2/010
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A method for determining the spring constant of cantilevers for atomic force microscopy

Abstract: Cantilevers fabricated by means of micromachining techniques are usually used for atomic force microscopy. In this paper, the spring constant of an atomic force microscope (AFM) cantilever is determined by using a large-scale cantilever. Since the spring constant of the large-scale cantilever is calibrated accurately, the spring constant of the AFM cantilever is determined precisely by measuring the deflections of both cantilevers simultaneously using heterodyne interferometry. The slope of the force curve giv… Show more

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Cited by 265 publications
(185 citation statements)
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References 16 publications
(22 reference statements)
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“…For this transformation, the spring constant of the cantilever is essential. We determined the spring constant by the method of measuring a force-distance-curve with the unknown cantilever against a reference with known spring constant as described previously [7]. The spring constant of the reference cantilever was determined by analyzing the resonance frequency of the cantilever with the Sader method [8].…”
Section: Resultsmentioning
confidence: 99%
“…For this transformation, the spring constant of the cantilever is essential. We determined the spring constant by the method of measuring a force-distance-curve with the unknown cantilever against a reference with known spring constant as described previously [7]. The spring constant of the reference cantilever was determined by analyzing the resonance frequency of the cantilever with the Sader method [8].…”
Section: Resultsmentioning
confidence: 99%
“…The inset pictures show SEM images of the SiO 2 microsphere and its cantilever. Using a calibration probe with a force constant of 2.957 N/m, the normal spring constants of the cantilever of SiO 2 tips were calibrated to be 10.5-13.8 N/m [13]. If not specially mentioned, the applied normal load F n was 5 μN, the sliding speed was 0.8 m/s, the number of sliding cycles was 2000, and the displacement amplitude D was 100 nm.…”
Section: Methodsmentioning
confidence: 99%
“…One possible way is to use a large-scale cantilever for which the spring constant can be calculated using Eq.3-2, as the reference cantilever (A. Torii et al 1996) [167]. The deflection of the AFM cantilever to be calibrated and the force applied by the reference cantilever allow to calculate the spring constant using Hooke's law.…”
Section: Reference Spring Methodsmentioning
confidence: 99%
“…(a) (b) Fig.3.9 Schematic setup for spring constant calibration using a reference cantilever, (a) before approach and (b) during contact [167].…”
Section: Reference Spring Methodsmentioning
confidence: 99%