A general purpose reconfigurable MEMS-based attenuator for Radio Frequency and microwave applications

RF MEMS passive components for wireless applications

“…An example of a MEMS-based multi-state reconfi gurable power attenuator is shown in the micro-photograph of Fig. 4.24, and discussed in Iannacci et al . (2010).…”

RF-MEMS: A development flow driving innovative device concepts to high performance components and networks for wireless applications

“…The MEMS compact model libra coupled electromechanical and elect complex RF-MEMS-based network example is a reconfigurable multi-s already presented in [8]. It is based o with 6 Poly-Silicon series resistors resistor can be selected or shorted d actuated or not actuated) of el suspended Gold membranes [8].…”

“…The Spectre schematic of the whole RF p completed by lumped element networks in accounting for the technology non idealit correspondence with the Gold to Multi-Meta an unwanted behavior is described in [8] wh for the extraction of the lumped element netw in [17]. The schematic in Fig.…”

“…It is based o with 6 Poly-Silicon series resistors resistor can be selected or shorted d actuated or not actuated) of el suspended Gold membranes [8]. O selected by means of SPDTs (Sing based on clamped-clamped MEMS s 5-top shows a microphotograph network (FBK technology) togeth profilometer) of one branch and one membrane.…”

“…switches), started to be demonstrated in literature. On the other hand, availability of lumped components with such outstanding performance boosted the conception and prototyping of widely reconfigurable RF-MEMS based complex networks, like phase shifters [5], impedance matching tuners [6], high-order switching matrices [7], power attenuators and splitters [8], tunable filters [9], and so on. In modern wireless transceivers and communication platforms the demand for high-performance, low-loss, low-power consumption and large reconfigurability is seamlessly increasing, and RF-MEMS represents an enabling technology to make such a scenario possible.…”