Compact Modeling of RF‐MEMS Devices

Iannacci, Jacopo

doi:10.1002/9783527647132.ch8

Cited by 6 publications

(1 citation statement)

References 17 publications

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“…The first solution enables coupling of multiple physical domains and resolution of complex problems typically linked to MEMS devices, as reported in [12,13], despite at the expense of significant computational loads and simulation time. On the other hand, compact modeling of MEMS problems enables fast behavioral analysis of coupled electromechanical problems, as discussed in [14,15], leading to rather accurate description of Microsystem based complex networks [16,17]. Furthermore, proper packaging and encapsulation of RF-MEMS devices is necessary for their optimal operation and final integration.…”

Section: Introductionmentioning

confidence: 98%

RF-MEMS: A development flow driving innovative device concepts to high performance components and networks for wireless applications

Iannacci

2014

2014 Microelectronic Systems Symposium (MESS)

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In this work the RF-MEMS technology available at the microfabrication facility of Fondazione Bruno Kessler -FBK (Italy) is discussed. The manufacturing flow, based on surface micromachining of Microsystems, enables the manufacturing of high performance and widely reconfigurable RF-MEMS passive lumped components, i.e. varactors, inductors and micro-relays, as well as complex networks, like phase shifters, impedance tuners, filters, power attenuators, etc. Despite the development flow of the mentioned RF-MEMS in FBK technology is pushed forth from the design to the fabrication, packaging and testing, the focus of this paper will be mainly devoted to modeling and simulation aspects. In conclusion, a couple of fabricated RF-MEMS passives examples will be listed and discussed.

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Section: Introductionmentioning

confidence: 98%

RF-MEMS: A development flow driving innovative device concepts to high performance components and networks for wireless applications

Iannacci

2014

2014 Microelectronic Systems Symposium (MESS)

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Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes

et al. 2013

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the netherlands), are experimentally characterized. Their behaviour is compared against simulations performed in anSYS Workbench™, confirming good accuracy of the predictive method. Furthermore, the electromechanical multiphysical behaviour of the Flc eh is also analysed in Workbench, by adding a layer with piezoelectric conversion properties in the simulation. The measured and simulated data reported in this paper confirm that the MeMS converter exhibits multiple resonant modes in the frequency range below 1 khz, where most of the environmental vibration energy is scattered, and extracted power levels of 0.2 μW can be achieved as well, in closed-loop conditions. Further developments of this work are expected to fully prove the high-performance of the Flc concept, and are going to be addressed by the authors of this work in the on-going activities.

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Compact modelling-based coupled simulation of RF-MEMS networks for 5G and Internet of Things (IoT) applications

Iannacci

2018

Microsyst Technol

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Compact Modeling of RF‐MEMS Devices

Cited by 6 publications

References 17 publications

RF-MEMS: A development flow driving innovative device concepts to high performance components and networks for wireless applications

RF-MEMS: A development flow driving innovative device concepts to high performance components and networks for wireless applications

Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes

Compact modelling-based coupled simulation of RF-MEMS networks for 5G and Internet of Things (IoT) applications

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