A 32 × 32 optical phased array using polysilicon sub-wavelength high-contrast-grating mirrors

Yoo, Byung Woo; Megens, Mischa; Sun, Tao; Yang, Wankou; Chang-Hasnain, Connie J.; Horsley, David A.; Wu, M.C.

doi:10.1364/oe.22.019029

Cited by 44 publications

(28 citation statements)

References 15 publications

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“…These characteristics (i.e., the ability to precisely control the phase with subwavelength resolution and high gradients, thin and light form factor, and compatibility with microfabrication techniques) also make them very attractive for integration with the microelectromechanical systems (MEMS) technology to develop metasurface-based micro-optoelectromechanical systems (MOEMS). To date, integration of metasurfaces and MEMS devices has been limited to moving uniform high-contrast grating mirrors to tune the resonance wavelength of Fabry-Perot cavities [52,53], or change roundtrip propagation length of light to form spatial light modulators [54].…”

Section: Introductionmentioning

confidence: 99%

MEMS-tunable dielectric metasurface lens

et al. 2018

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Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

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Section: Introductionmentioning

confidence: 99%

MEMS-tunable dielectric metasurface lens

et al. 2018

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“…Recently, we have reported a new spatial light phase modulator array with MEMS piston mirrors [21]. Phase modulation is achieved by electrostatically pulling down the mirrors by a fraction of the wavelength (from 0 to π), which affects the beam path length (from 0 to 2π).…”

Section: Phase Modulation Memsmentioning

confidence: 99%

Diffraction-Based Optical Switching with MEMS

et al. 2017

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Abstract:We are presenting an overview of MEMS-based (Micro-Electro-Mechanical System) optical switch technology starting from the reflective two-dimensional (2D) and three-dimensional (3D) MEMS implementations. To further increase the speed of the MEMS from these devices, the mirror size needs to be reduced. Small mirror size prevents efficient reflection but favors a diffraction-based approach. Two implementations have been demonstrated, one using the Texas Instruments DLP (Digital Light Processing), and the other an LCoS-based (Liquid Crystal on Silicon) SLM (Spatial Light Modulator). These switches demonstrated the benefit of diffraction, by independently achieving high speed, efficiency, and high number of ports. We also demonstrated for the first time that PSK (Phase Shift Keying) modulation format can be used with diffraction-based devices. To be truly effective in diffraction mode, the MEMS pixels should modulate the phase of the incident light. We are presenting our past and current efforts to manufacture a new type of MEMS where the pixels are moving in the vertical direction. The original structure is a 32 × 32 phase modulator array with high contrast grating pixels, and we are introducing a new sub-wavelength linear array capable of a 310 kHz modulation rate.

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“…The phase of the reflected wave experiences a 2π phase shift when the mirror is displaced by half a wavelength [21]. 2D MEMS OPAs have been reported for UV [22,23] and near-infrared wavelengths [24][25][26][27]. In addition to fast response time, MEMS OPAs are capable of withstanding high optical power and polarization-independent operation.…”

Section: Introductionmentioning

confidence: 99%

2D broadband beamsteering with large-scale MEMS optical phased array

Wang

Zhou

Zhang

et al. 2019

Optica

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144

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Optical-phased arrays (OPAs) enable complex beamforming, random-access beam pointing, and simultaneous scan and tracking of multiple targets by controlling the phases of two-dimensional (2D) coherent emitters. So far, no OPA can achieve all desirable features including large 2D arrays, high optical efficiency, wideband operation in wavelengths, fast response time, and large steering angles at the same time. Here, we report on a large-scale 2D OPA with novel microelectro-mechanical-system (MEMS)-actuated phase shifters. Wavelength-independent phase shifts are realized by physically moving a grating element in the lateral direction. The OPA has 160 × 160 independent phase shifters across an aperture of 3.1 mm × 3.2 mm. It has a measured beam divergence of 0.042°× 0.031°, a field of view (FOV) of 6.6°× 4.4°, and a response time of 5.7 μs. It is capable of providing about 25,600 rapidly steerable spots within its FOV. The grating phase shifters are optimized for the near-infrared telecom wavelength bands from 1200 to 1700 nm with 85% optical efficiency.

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A 32 × 32 optical phased array using polysilicon sub-wavelength high-contrast-grating mirrors

Cited by 44 publications

References 15 publications

MEMS-tunable dielectric metasurface lens

MEMS-tunable dielectric metasurface lens

Diffraction-Based Optical Switching with MEMS

2D broadband beamsteering with large-scale MEMS optical phased array

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