MEMS-tunable dielectric metasurface lens

Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa; Horie, Yu; Faraji-Dana, MohammadSadegh; Faraon, Andrei

doi:10.1038/s41467-018-03155-6

Cited by 604 publications

(472 citation statements)

References 70 publications

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“…[48] Each nanoscatterer can be treated as an individual truncated waveguide, which supports multiple Fabry-Perot resonances with low quality factors. [49] Different from all-dielectric Huygens' metasurfaces with dominant electric and Reproduced with permission. [40] Copyright 2015, Wiley-VCH.…”

Section: High-contrast Metasurfacesmentioning

confidence: 99%

Fundamentals and Applications of Metasurfaces

2017

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Metasurfaces have become a rapidly growing field of research in recent years due to their exceptional abilities in light manipulation and versatility in ultrathin optical applications. They also significantly benefit from their simplified fabrication process compared to metamaterials and are promising for integration with on‐chip nanophotonic devices owing to their planar profiles. The recent progress in metasurfaces is reviewed and they are classified into six categories according to their underlying physics for realizing full 2π phase manipulation. Starting from multi‐resonance and gap‐plasmon metasurfaces that rely on the geometric effect of plasmonic nanoantennas, Pancharatnam–Berry‐phase metasurfaces, on the other hand, use identical nanoantennas with varying rotation angles. The recent development of Huygens' metasurfaces and all‐dielectric metasurfaces especially benefit from highly efficient transmission applications. An overview of state‐of‐the‐art fabrication technologies is introduced, ranging from the commonly used processes such as electron beam and focused‐ion‐beam lithography to some emerging techniques, such as self‐assembly and nanoimprint lithography. A variety of functional materials incorporated to reconfigurable or tunable metasurfaces is also presented. Finally, a few of the current intriguing metasurface‐based applications are discussed, and opinions on future prospects are provided.

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Section: High-contrast Metasurfacesmentioning

confidence: 99%

Fundamentals and Applications of Metasurfaces

2017

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“…Benefiting from the exotic properties of metasurfaces, various types of metalenses with unusual functionalities have been developed. Examples include dualpolarity plasmonic metalens, [34] broadband/multispectral achromatic metalens, [35][36][37][38] metalens array, [39] light-sword lens, [40] multi-foci lens, [41] multifunctional metalens, [42] and polarizationdependent metalens. [43] An optical element with polarization manipulation functionality, that is, polarization rotator, has been used in many research areas ranging from optical isolators [44] to sophisticated organic structure analysis.…”

Section: Introductionmentioning

confidence: 99%

A Multi‐Foci Metalens with Polarization‐Rotated Focal Points

Zang

Ding

Intaravanne

et al. 2019

Laser & Photonics Reviews

151

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Benefiting from the unprecedented capability of metasurfaces in the manipulation of light propagation, metalenses can provide novel functions that are very challenging or impossible to achieve with conventional lenses. Here, an approach to realizing multi‐foci metalenses is proposed and experimentally demonstrated with polarization‐rotated focal points based on geometric metasurfaces. Multi‐foci metalenses with various polarization rotation directions are developed using silicon pillars with spatially variant orientations. The focusing characteristic and longitudinal polarization‐dependent imaging capability are demonstrated upon the illumination of a linearly polarized light beam. The uniqueness of this multi‐foci metalens with polarization‐rotated focal points may open a new avenue for imaging, sensing, and information processing.

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“…Motivated by this, much effort has been made to realize tunable metasurfaces, whose functionalities have been expanded from wavefront manipulations to other programmable platforms . For this purpose, dynamic control is necessary and many methods of tuning such as mechanical deformations and lumped‐elements coding have been successfully employed and demonstrated . These ways normally work in the microwave range, which is hard to down‐scale to the optical band because of the difficulty in minimizing active elements.…”

Section: Introductionmentioning

confidence: 99%

Tunable Metasurfaces Based on Active Materials

Cui

Bai

Sun

2019

Adv Funct Materials

204

111

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Metasurfaces, planer artificial materials composed of subwavelength unit cells, have shown superior abilities to manipulate the wavefronts of electromagnetic waves. In the last few years, metasurfaces have been a burgeoning field of research, with a large variety of functional devices, including planar lenses, beam deflectors, polarization converters, and metaholograms, being demonstrated. Up to date, the majority of metasurfaces cannot be tuned postfabrication. Yet, the dynamic control of optical properties of metasurfaces is highly desirable for a plethora of applications including free space optical communications, holographic displays, and depth sensing. Recently, much effort has been made to exploit active materials, whose optical properties can be controlled under external stimuli, for the dynamic control of metasurfaces. The tunability enabled by active materials can be attributed to various mechanisms, including but not limited to thermo‐optic effects, free‐carrier effects, and phase transitions. This short review summarizes the recent progress on tunable metasurfaces based on various approaches and analyzes their respective advantages and challenges to be confronted with. A number of potential future directions are also discussed at the end.

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MEMS-tunable dielectric metasurface lens

Cited by 604 publications

References 70 publications

Fundamentals and Applications of Metasurfaces

Fundamentals and Applications of Metasurfaces

A Multi‐Foci Metalens with Polarization‐Rotated Focal Points

Tunable Metasurfaces Based on Active Materials

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