Among various flat optical devices, metasurfaces have presented their great ability in efficient manipulation of light fields and have been proposed for variety of devices with specific functionalities. However, due to the high phase dispersion of their building blocks, metasurfaces significantly suffer from large chromatic aberration. Here we propose a design principle to realize achromatic metasurface devices which successfully eliminate the chromatic aberration over a continuous wavelength region from 1200 to 1680 nm for circularly-polarized incidences in a reflection scheme. For this proof-of-concept, we demonstrate broadband achromatic metalenses (with the efficiency on the order of ∼12%) which are capable of focusing light with arbitrary wavelength at the same focal plane. A broadband achromatic gradient metasurface is also implemented, which is able to deflect wide-band light by the same angle. Through this approach, various flat achromatic devices that were previously impossible can be realized, which will allow innovation in full-color detection and imaging.

Metasurfaces have become a rapidly growing field of research in recent years due to their exceptional abilities in light manipulation and versatility in ultrathin optical applications. They also significantly benefit from their simplified fabrication process compared to metamaterials and are promising for integration with on‐chip nanophotonic devices owing to their planar profiles. The recent progress in metasurfaces is reviewed and they are classified into six categories according to their underlying physics for realizing full 2π phase manipulation. Starting from multi‐resonance and gap‐plasmon metasurfaces that rely on the geometric effect of plasmonic nanoantennas, Pancharatnam–Berry‐phase metasurfaces, on the other hand, use identical nanoantennas with varying rotation angles. The recent development of Huygens' metasurfaces and all‐dielectric metasurfaces especially benefit from highly efficient transmission applications. An overview of state‐of‐the‐art fabrication technologies is introduced, ranging from the commonly used processes such as electron beam and focused‐ion‐beam lithography to some emerging techniques, such as self‐assembly and nanoimprint lithography. A variety of functional materials incorporated to reconfigurable or tunable metasurfaces is also presented. Finally, a few of the current intriguing metasurface‐based applications are discussed, and opinions on future prospects are provided.

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Metasurface-based components are known to be one of the promising candidates for developing flat optical systems. However, their low working efficiency highly limits the use of such flat components for feasible applications. Although the introduction of the metallic mirror has been demonstrated to successfully enhance the efficiency, it is still somehow limited for imaging and sensing applications because they are only available for devices operating in a reflection fashion. Here, we demonstrate three individual GaN-based metalenses working in a transmission window with extremely high operation efficiency at visible light (87%, 91.6%, and 50.6% for blue, green, and red light, respectively). For the proof of concept, a multiplex color router with dielectric metalens, which is capable of guiding individual primary colors into different spatial positions, is experimentally verified based on the design of out-of-plane focusing metalens. Our approach with low-cost, semiconductor fabrication compatibility and high working efficiency characteristics offers a way for establishing a complete set of flat optical components for a wide range of applications such as compact imaging sensors, optical spectroscopy, and high-resolution lithography, just named a few.

All forms of light manipulation rely on light-matter interaction, the primary mechanism of which is the modulation of its electromagnetic fields by the localized electromagnetic fields of atoms. One of the important factors that influence the strength of interaction is the polarization of the electromagnetic field. The generation and manipulation of light polarization have been traditionally accomplished with bulky optical components such as waveplates, polarizers, and polarization beam splitters that are optically thick. The miniaturization of these devices is highly desirable for the development of a new class of compact, flat, and broadband optical components that can be integrated together on a single photonics chip. Here we demonstrate, for the first time, a reflective metasurface polarization generator (MPG) capable of producing light beams of any polarizations all from a linearly polarized light source with a single optically thin chip. Six polarization light beams are achieved simultaneously including four linear polarizations along different directions and two circular polarizations, all conveniently separated into different reflection angles. With the Pancharatnam-Berry phase-modulation method, the MPG sample was fabricated with aluminum as the plasmonic metal instead of the conventional gold or silver, which allowed for its broadband operation covering the entire visible spectrum. The versatility and compactness of the MPG capable of transforming any incident wave into light beams of arbitrary polarizations over a broad spectral range are an important step forward in achieving a complete set of flat optics for integrated photonics with far-reaching applications.

We propose all-dielectric metasurfaces that can be actively re-configured using the phase-change material Ge 2 Sb 2 Te 5 (GST) alloy. With selectively controlled phase transitions on the composing GST elements, metasurfaces can be tailored to exhibit varied functionalities. Using phase-change GST rod as the basic building block, we have modelled metamolecules with tunable optical response when phase change occurs on select constituent GST rods. Tunable gradient metasurfaces can be realized with variable supercell period consisting of different patterns of the GST rods in their amorphous and crystalline states. Simulation results indicate a range of functions can be delivered, including multilevel signal modulating, near-field coupling of GST rods, and anomalous reflection angle controlling. This work opens up a new space in exploring active meta-devices with broader applications that cannot be achieved in their passive counterparts with permanent properties once fabricated.

The research and development of optical metasurfaces has been primarily driven by the curiosity for novel optical phenomena that are unattainable from materials that exist in nature and by the desire for miniaturization of optical devices. Metasurfaces constructed of artificial patterns of subwavelength depth make it possible to achieve flat, ultrathin optical devices of high performance. A wide variety of fabrication techniques have been developed to explore their unconventional functionalities which in many ways have revolutionized the means with which we control and manipulate electromagnetic waves. The relevant research community could benefit from an overview on recent progress in the fabrication and applications of the metasurfaces. This review article is intended to serve that purpose by reviewing the state-of-the-art fabrication methods and surveying their cutting-edge applications.

The development of two-dimensional metasurfaces has shown great potential in quantum-optical technologies because of the excellent flexibility in light-field manipulation. By integrating a metalens array with a nonlinear crystal, we demonstrate a 100-path spontaneous parametric down-conversion photon-pair source in a 10 × 10 array, which shows promise for high-dimensional entanglement and multiphoton-state generation. We demonstrate two-, three- and four-dimensional two-photon path entanglement with different phases encoded by metalenses with fidelities of 98.4, 96.6, and 95.0%, respectively. Furthermore, four-photon and six-photon generation is observed with high indistinguishability of photons generated from different metalenses. Our metalens-array–based quantum photon source is compact, stable, and controllable, indicating a new platform for integrated quantum devices.