2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers 2013
DOI: 10.1109/isscc.2013.6487707
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A 128Gb 3b/cell NAND flash design using 20nm planar-cell technology

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Cited by 16 publications
(7 citation statements)
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“…On the contrary NAND Flash evolution in the last decade has shown an impressive growth rate of a factor or 3Â/year in terms of MB/cm 2 . For NAND Flash this evolution has essentially been achieved by the wide adoption of multi-bit storage, reaching the level of 3 bit/cell for 20 nm technology node [4,5]. Very sophisticated design solutions have been put in place to overcome all problems related to cell to cell electrostatic interference, read disturbs and cycling defects.…”
Section: Evolution Of Mainstream Memorymentioning
confidence: 99%
“…On the contrary NAND Flash evolution in the last decade has shown an impressive growth rate of a factor or 3Â/year in terms of MB/cm 2 . For NAND Flash this evolution has essentially been achieved by the wide adoption of multi-bit storage, reaching the level of 3 bit/cell for 20 nm technology node [4,5]. Very sophisticated design solutions have been put in place to overcome all problems related to cell to cell electrostatic interference, read disturbs and cycling defects.…”
Section: Evolution Of Mainstream Memorymentioning
confidence: 99%
“…12. This makes the phenomenon dependent on some relevant cell and array parameters, such as: 1) the cell floating-gate height [3]; 2) the floating-gate distance along the bit-line (BL) direction; (corresponding to the array WL half-pitch) and along the WL direction (corresponding to the BL half-pitch) [34]; 3) the depth of the WL penetration between the floating-gates of adjacent cells in the WL direction [35]; and 4) the dielectric constant of the material surrounding the floating-gates [5], [67].…”
Section: A Magnitude Of the Most Relevant Issues For Array Reliabilitymentioning
confidence: 99%
“…1). Thanks to the combined action of a small feature size and a number of bits per cell greater than 1, GBSD close to 1 Gbit/mm 2 were reached by the last 2-D NAND Flash chips [3], [4].…”
mentioning
confidence: 99%
“…This array constitutes a block, whose size is a key element in NAND array organization. Cross-sections of a current planar NAND array are shown on the right of Figure 1: Figure 1a depicts a typical cut along the WL (green = silicon, red = floating gate, magenta = WL, white = silicon oxide), highlighting the shallow trench isolation used to separate the active area of adjacent devices [33] and the planar structure of the cell, without any wrapping of the control gate along the floating gate sidewalls [34]. Figure 1b depicts instead the cross-section along the string direction.…”
Section: Array Architecture and Layoutmentioning
confidence: 99%