1998
DOI: 10.1023/a:1006699625013
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Cited by 8 publications
(2 citation statements)
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“…Using this method, the thin film which features few droplets and has a smooth surface has been prepared. [9][10][11][12] Furthermore, we have placed the substrate facing the BS and attempted to prepare the thin film. This substrate position has been called mask-side (MS) configuration.…”
Section: Introductionmentioning
confidence: 99%
“…Using this method, the thin film which features few droplets and has a smooth surface has been prepared. [9][10][11][12] Furthermore, we have placed the substrate facing the BS and attempted to prepare the thin film. This substrate position has been called mask-side (MS) configuration.…”
Section: Introductionmentioning
confidence: 99%
“…[6][7][8][9][10][11][12] The solid target is irradiated by an intense pulsed light ion beam (LIB), 11,13,14) to produce high-temperature, high-density ablation plasma. The plume is deposited on the substrate.…”
Section: Introductionmentioning
confidence: 99%